Data Dictionary
>
FPSBASE Views
> FPSBASE.WIP_WAFER_HIST_LOOP
View FPSBASE.CHK_SHARED_PARENT_WARNINGS
This view summarizes recent warnings where the WIP_EVENT_HIST_INSERT_BEF trigger is unable to determine the tool for an event logged to the shared_parent_tool. This is because either no tools are allowed or multiple tools are allowed for the process. The ETL should be reviewed in these cases but we have agreed that it is not quite worth sending our errors in SYSMNTR_ERRORS so we log these as I rather than R in ADM_LOAD_HIST and provide this view.
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Column |
Comment |
|---|---|
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LOGGED_ENT_OF_STEP_EVENT |
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LOGGED_ENTITY |
Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* inherited from FPSINPUT.EQP_EVENT_HIST) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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SHARED_PARENT_TOOL |
This indicates that multiple tools share the same physical parent tool even though they operate completely independently. It is critical that the shared_parent_tool not have the same name as the tool or any other tool. Tubes in a furnace are one example. Chambers that are completely independent are another example but we need to be very careful when we define chambers or groups of chambers as separate tools. This should be done when there is no possibility that a lot might run across what we define as tools. (* inherited from FPSINPUT.EQP_TOOLS) |
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LOT |
A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC) |
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INST |
Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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EVENT |
This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* inherited from FPSINPUT.WIP_EVENTS) |
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PROCESS |
Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES) |
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NEXT_PROCESS |
Process of the next step. Populated by trigger. (* inherited from FPSBASE.WIP_LOT_HIST) |
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BEG_PROC_INST |
time when the lot started processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL) |
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END_PROC_INST |
time when the lot finished processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL) |
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NO_OR_MULTIPLE |
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WHERE_CLAUSE |
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LONG_MSG |