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FPSINPUT.MSO_RISK_PEAK_HIST

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Table FPSINPUT.MSO_RISK_PEAK_HIST"

Gives the maximum wafers at risk and lots at risk between each measurement to be used for calculations in the Dashboard.

  • Schema: FPSINPUT

  • Tablespace: FPSDATAHIST

  • Primary key: FROM_MSO_INST, FACILITY, SMP_RULE_ID, FROM_MSO_TOOL, CHAMBER, LOT


Column

Type

Nullable

Comment

FROM_MSO_INST

DATE

N

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

SMP_RULE_ID

NUMBER(9)

N

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

FROM_MSO_TOOL

VARCHAR2(16)

N

CHAMBER

VARCHAR2(19)

N

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* from FPSINPUT.EQP_CHAMBERS)

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

CHAMBER_MSO_GROUP_NA

VARCHAR2(64)

This is the counter definition value for chamber mso group. If chamber mso group is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the chamber mso group value. (* from FPSBASE.MSO_PROCESS_HIST)

CHAMBER_NA

VARCHAR2(19)

This is the counter definition value for chamber. If chamber is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the chamber value. (* from FPSBASE.MSO_PROCESS_HIST)

FROM_START_SHIFT

DATE

FROM_START_WEEK

DATE

LOTS_AT_RISK

NUMBER(9)

LOT_GROUP_NA

VARCHAR2(8)

Lots that are of the defined lot mso group will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

LOT_MSO_GROUP_NA

VARCHAR2(8)

This is the counter definition value for lot mso group. If lot mso group is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the lot mso group value. (* from FPSBASE.MSO_PROCESS_HIST)

LOT_PARM_NAME

VARCHAR2(32)

Lots that have this MES parameter set with its corresponding value will be tagged or never tagged, depending on the condition type that is selected. If the value is NULL the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

MSO_PROCESS_NA

VARCHAR2(100)

This is the counter definition value for mso process. If mso process is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the mso process value. (* from FPSBASE.MSO_PROCESS_HIST)

OPERATION_NA

VARCHAR2(50)

This is the counter definition value for operation. If operation is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the operation value. (* from FPSBASE.MSO_PROCESS_HIST)

PLAN_PRIORITY_NA

VARCHAR2(7)

Lots that are of the defined plan priority will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

PRD_MSO_GROUP_NA

VARCHAR2(64)

Lots that are of a product in the defined PRD_MSO_GROUP will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

PRD_NA

VARCHAR2(64)

Lots that are of the defined product will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

ROUTE_MSO_GROUP_NA

VARCHAR2(64)

Lots that are of a part in the defined ROUTE_MSO_GROUP will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

ROUTE_NA

VARCHAR2(256)

Lots that are of the defined route will be tagged or never tagged, depending on the condition type that is selected. If the value is NA the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

TOOL_MSO_GROUP_NA

VARCHAR2(64)

This is the counter definition value for tool mso group. If tool mso group is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the tool mso group value. (* from FPSBASE.MSO_PROCESS_HIST)

TOOL_NA

VARCHAR2(16)

This is the counter definition value for tool. If tool is not part of the rule definition and included in the counter then it will be NA, otherwise it will have the tool value. (* from FPSBASE.MSO_PROCESS_HIST)