FPSADMIN.RTG_REF_PROCESS_RCP_EQPTYPES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

EST_MACHINE_RECIPE

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* inherited from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_SUBFAMILY

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)

IS_REAL_TOOL

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* inherited from FPSINPUT.EQP_TYPES)

PERM_RANK_SORT

PROC_STATE_IF_WAIT

EST_USE_PCT

Estimated use percentage is the percentage of units of this route-step that we expect to run on this eqp_type. Normally we use historical data to calculate this for the Capacity Model but entering a value in the OVR table manually overrides that historical number. (* inherited from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

PRI_PROCESS_FAMILY

PRI_PFAM_RANK_SORT

PROD_QTY

TOTAL_QTY

FIRST_UNIT_SEC

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* inherited from FPSINPUT.THP_EXTERNAL)

FIRST_UNIT_CV

UNIT_INT_SEC

UNIT_INT_CV

BATCH_INT_SEC

TCT_SEC

Theoretical cycle time in seconds (* inherited from FPSBASE.WIP_LOT_HIST)

EET_SEC

End-to-end time in seconds (* inherited from FPSBASE.WIP_LOT_HIST)

MPU

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* inherited from FPSBASE.WIP_LOT_HIST)

MPU_CV

UPH

UPH is a commonly used abbreviation which stands for units per hour. It is often referred to as WPH which for wafers per hour but UPH is better because the unit is not always wafer. (* inherited from FPSBASE.RTG_PROCESS_RCP_EQPTYPES)

RQD_SETUP

Rqd_setup is determined by ovr_rqd_setup in RTG_TOOL_ASSIGNMENTS and use_process_as_rqd_setup and use_est_mach_rcp_as_rqd_setup from EQP_TYPES. The latter two columns allow us to easily specify for an eqp_type that setup times should be calculated by process or est_machine_recipe. For traditional setups that are a group of recipes we use ovr_rqd_setup. (* inherited from FPSBASE.WIP_LOT_HIST)

RCP_EXP_QTY_PER_BATCH

RCP_MAX_BATCH_SIZE_CARRIERS

RCP_MAX_BATCH_SIZE_LOTS

RCP_MAX_BATCH_SIZE_UNITS

RCP_LABOR_ROLE

RCP_LABOR_SEC_PER_BATCH

RCP_LABOR_SEC_PER_CARR

RCP_LABOR_SEC_PER_UNIT

THP_FILLIN_GROUP

WHICH_CH_TYPE_CNT

SPECIFIC_ROUTE

IS_BATCH_THP

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* inherited from FPSINPUT.EQP_TYPES)

ENDED_SEC_FROM_THP

THP_NUM_JOBS

CALC_TYPE

THP_MEMO