FPSINPUT.SCH_P_GROUP_PRE_BATCH

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PRE_BATCH_ID

is used to tell the id of this pre-batch sequence (* inherited from FPSAPP.SCH_C_GROUP_PRE_BATCH_SEQ)

PRE_BATCH_DESC

MAX_BATCH_SIZE_CARRIERS

Maximum number of carriers which can be loaded together in a batch. This column must be populated and is used for ETP and for scheduling to determines whether the tool loads in batches. Non-batch tools will have a value of 1 and batch tools limited by units will be populated according to the comment in max_batch_size_units. This is not used for throughput calculation because we can have tools which load multiple carriers at once but whose throughput is calculated per unit. (* inherited from FPSINPUT.EQP_TYPES)

MAX_BATCH_SIZE_LOTS

The maximum number of lots allowed in one batch (* inherited from FPSINPUT.EQP_TYPES)

MAX_BATCH_SIZE_UNITS

Maximum number of units which can be loaded together in a batch for a tool where the batch size is limited by the number of units. This value should nearly always be greater than the standard lot size. If it is less, that means that standard lots must be split in order to run on this tool. This is rare but possible therefore we have no constraint and allow this value to be as small as 1. This column will be null for non-batch tools. For batch tools,There are three cases to consider here. The first case is where the limit is only on carriers which is most common. For example, a furnace can load up to 6 carriers regardless of the units in each carrier. In this case, max_bs_carriers is 6 and max_bs_units is null. The second case is where the limit is only on units. For example, the tool can load 100 wafers regardless of the number of carriers. In this case, max_bs_units and max_bs_carriers should both be 100 which indicates that we could theoretically load a full batch of 100 carriers each with one unit. The third case is where the limit is on both carriers and units. For example, you can load up to 4 carriers and up to 80 units (meaning you cannot load 4 carriers of 25 units each nor can you load 5 carriers of 15 wafers each). In this case, max_bs_carriers is 4 and max_bs_units is 80. (* inherited from FPSINPUT.EQP_TYPES)

MIN_BATCH_SIZE_CARRIERS

Minimum number of carriers which should be loaded together in a batch. Scheduler will do everything possible to wait for at least this many carriers before scheduling. (* inherited from FPSINPUT.EQP_TYPES)

MIN_BATCH_SIZE_LOTS

The minimum number of lots required in one batch (* inherited from FPSINPUT.EQP_TYPES)

MIN_BATCH_SIZE_UNITS

Minimum number of units which should be loaded together in a batch. Scheduler will do everything possible to wait for at least this many units before scheduling. (* inherited from FPSINPUT.EQP_TYPES)