FPSBASE.ECTA_P_BASE

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

BANK

VARCHAR2(36)

N

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

LOT_GROUP

VARCHAR2(8)

N

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* from FPSINPUT.WIP_LOT_GROUPS)

PRTY_CTM_GROUP

VARCHAR2(7)

N

This is one of the primary keys of our CTM tables. We use this group rather than the priority because we often have several different priorities which are close and are expected to have the same cycle time. (* from FPSINPUT.WIP_PRIORITIES)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PLANPRD

VARCHAR2(64)

N

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PLANPRDS)

ROUTE_FAMILY

VARCHAR2(36)

N

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ABORT_SEC_2D_WAVG

NUMBER

ABORT_SEC_7D_WAVG

NUMBER

ABORT_SEC_FULL_WAVG

NUMBER

ABORT_SEC_LONG_WAVG

NUMBER

BLOCK_SEC_2D_WAVG

NUMBER

BLOCK_SEC_7D_WAVG

NUMBER

BLOCK_SEC_FULL_WAVG

NUMBER

BLOCK_SEC_LONG_WAVG

NUMBER

COMMIT_CT

NUMBER

DISP_SEC_2D_WAVG

NUMBER

DISP_SEC_7D_WAVG

NUMBER

DISP_SEC_FULL_WAVG

NUMBER

DISP_SEC_LONG_WAVG

NUMBER

DOWN_SEC_2D_WAVG

NUMBER

DOWN_SEC_7D_WAVG

NUMBER

DOWN_SEC_FULL_WAVG

NUMBER

DOWN_SEC_LONG_WAVG

NUMBER

ENDED_SEC_2D_WAVG

NUMBER

ENDED_SEC_7D_WAVG

NUMBER

ENDED_SEC_FULL_WAVG

NUMBER

ENDED_SEC_LONG_WAVG

NUMBER

EST_TRANSIT_SEC

NUMBER

FACILITY_DISPLAY

VARCHAR2(20)

The name of the facility displayed on all dashboards and reports. Facility is a short field since it is used in every join so we allow a longer more descriptive name here although often this will be the same as the facility. (* from FPSINPUT.GEN_FACILITIES)

HOLD_SEC_2D_WAVG

NUMBER

HOLD_SEC_7D_WAVG

NUMBER

HOLD_SEC_FULL_WAVG

NUMBER

HOLD_SEC_LONG_WAVG

NUMBER

IS_MAIN_ROUTE

CHAR(1)

Y indicates the route is the main processing route for PRD. N indicates it is a rework or alternate route. (* from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

LINE_SECTION

VARCHAR2(32)

Large grouping of the line, e.g. FEOL, BEOL, Cu, etc. There should be only a handful of values for the entire facility - or if the facility only has one section then we can leave this column blank. (* from FPSINPUT.RTG_LINE_SECTIONS)

LONGH_SEC_2D_WAVG

NUMBER

LONGH_SEC_7D_WAVG

NUMBER

LONGH_SEC_FULL_WAVG

NUMBER

LONGH_SEC_LONG_WAVG

NUMBER

MODULE

VARCHAR2(12)

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* from FPSINPUT.GEN_MODULES)

MODULE_DISPLAY

VARCHAR2(20)

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* from FPSINPUT.GEN_MODULES)

NUM_LOTS_MOVED_2D

NUMBER

NUM_LOTS_MOVED_7D

NUMBER

NUM_LOTS_MOVED_FULL

NUMBER

NUM_LOTS_MOVED_LONG

NUMBER

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

PROC_SEC_2D_WAVG

NUMBER

PROC_SEC_7D_WAVG

NUMBER

PROC_SEC_FULL_WAVG

NUMBER

PROC_SEC_LONG_WAVG

NUMBER

PROC_STATE_AVG_WIP_2D

NUMBER

PROC_STATE_AVG_WIP_7D

NUMBER

PROC_STATE_AVG_WIP_FULL

NUMBER

PROC_STATE_AVG_WIP_LONG

NUMBER

QTY_COMP_2D

NUMBER

QTY_COMP_7D

NUMBER

QTY_COMP_FULL

NUMBER

QTY_COMP_LONG

NUMBER

QTY_MOVED_2D

NUMBER

QTY_MOVED_7D

NUMBER

QTY_MOVED_FULL

NUMBER

QTY_MOVED_LONG

NUMBER

QTY_UNIT

VARCHAR2(12)

Defines the unit used to measure number of quantity. The key here is that this quantity must be known throughout the entire route through the facility. For example in a sort facility where lots enter in wafers and are broken into die but the number of wafers is still known when the lot completes the facility then the qty_unit must be wafer. It cannot be die because die is not known when the lot enters so die will be the sec_qty_unit. Similarly at a final test facility where the lots enter with both wafers and die known but only die are known when the lot completes the facility then the qty_unit must be die. It cannot be wafer because wafer is not known when the lot completes so wafer will be the sec_qty_unit. Please note the entire process from only wafers to only die must be split into at least two facilities because of this requirement. (* from FPSINPUT.GEN_FACILITIES)

RESRV_SEC_2D_WAVG

NUMBER

RESRV_SEC_7D_WAVG

NUMBER

RESRV_SEC_FULL_WAVG

NUMBER

RESRV_SEC_LONG_WAVG

NUMBER

ROUTE_GROUP

VARCHAR2(36)

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* from FPSINPUT.RTG_ROUTE_GROUPS)

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

SEQ_NUM

NUMBER

Sequence number of step in route (* from FPSINPUT.RTG_ROUTE_STEPS)

SHIFT_CNT_2D

NUMBER

SHIFT_CNT_7D

NUMBER

SHIFT_CNT_FULL

NUMBER

SHIFT_CNT_LONG

NUMBER

SHUTD_SEC_2D_WAVG

NUMBER

SHUTD_SEC_7D_WAVG

NUMBER

SHUTD_SEC_FULL_WAVG

NUMBER

SHUTD_SEC_LONG_WAVG

NUMBER

START_WEEK

DATE

Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* from FPSINPUT.CAL_WORK_WEEKS)

STG_SEC_2D_WAVG

NUMBER

STG_SEC_7D_WAVG

NUMBER

STG_SEC_FULL_WAVG

NUMBER

STG_SEC_LONG_WAVG

NUMBER

TARGET_CT

NUMBER

TRANSIT_EXPLANATION

VARCHAR2(128)

WAFER_SIZE

VARCHAR2(8)

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* from FPSINPUT.GEN_WAFER_SIZES)

WAIT1_SEC_2D_WAVG

NUMBER

WAIT1_SEC_7D_WAVG

NUMBER

WAIT1_SEC_FULL_WAVG

NUMBER

WAIT1_SEC_LONG_WAVG

NUMBER

WAIT2_SEC_2D_WAVG

NUMBER

WAIT2_SEC_7D_WAVG

NUMBER

WAIT2_SEC_FULL_WAVG

NUMBER

WAIT2_SEC_LONG_WAVG

NUMBER

WAIT3_SEC_2D_WAVG

NUMBER

WAIT3_SEC_7D_WAVG

NUMBER

WAIT3_SEC_FULL_WAVG

NUMBER

WAIT3_SEC_LONG_WAVG

NUMBER

WHY_OTHERS_2D

NUMBER

WHY_OTHERS_7D

NUMBER

WHY_OTHERS_FULL

NUMBER

WHY_OTHERS_LONG

NUMBER

WHY_PROC_2D

NUMBER

WHY_PROC_7D

NUMBER

WHY_PROC_FULL

NUMBER

WHY_PROC_LONG

NUMBER

WHY_SKIP_BANK_2D

NUMBER

WHY_SKIP_BANK_7D

NUMBER

WHY_SKIP_BANK_FULL

NUMBER