FPSAPP.SCH_P_RPT_DURABLE_QUAL

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

DURABLE

Durables are either reticles for Litho or probe cards for Wet or Sort. A durable can either be in a carrier or at a location without a carrier. (* inherited from FPSINPUT.RTG_DURABLES)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

RANK

Rank is a single character like P for primary or A for alternate or S for setup. The ranks defined in perm, temp, extl_rank columns in RTG_TOOL_ASSIGNMENTS tables are in RTG_PERM_RANKS. The ranks defined automatically in WIP_STEP_FUT_ASGN views are in RTG_CURR_RANKS. All ranks are defined by FPS and the specific values are used in the Scheduler therefore we must translate in the ETL to assign to the most appropriate perm_rank. (* inherited from FPSADMIN.RTG_PERM_RANKS)

FIRST_SCHED_START

TTS_MINS

NUM_LOTS_WAITING