FPSBASE.DASH_P_MNT_EPISODE_HIST

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

ETP_E10_STATE

EPISODE_FROM_INST

Start of the episode is when the last production lot missed the cascade unless there is no WIP then it is when the entity was logged into the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

EPISODE_TO_INST

End of the episode is when the first production lot started unless there is no WIP then it is when the entity was logged out of the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

DOWN_REASON

A value from a reasonably short list of user-defined reasons why the entity went down. (* inherited from FPSINPUT.EQP_EVENT_HIST)

REPAIR_REASON

These are the values that can be found in EQP_EVENT_HIST REPAIR_REASON. A value from a reasonably short list of user-defined explanations of how the entity will be repaired or what caused it to go down. (* inherited from FPSINPUT.EQP_REPAIR_REASONS)

ETP_E10_STATE_BEFORE

ETP_E10_STATE_AFTER

PREV_BEG_PROC_INST

PREV_MISS_CASC_INST

Previous time a cascade was missed. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

PREV_END_PROC_INST

End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations. (* inherited from FPSBASE.WIP_LOT_HIST)

E10_FROM_INST

Time when the entity was logged into the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

E10_TO_INST

Time when the entity was logged out of the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

FIRST_QUAL_FROM_INST

First time during the maintenance when the tool was logged into qualification. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

LAST_QUAL_TO_INST

FIRST_NOWIP_FROM_INST

LAST_NOWIP_TO_INST

PREV_MISS_CASC_SBY_STATE

PREV_END_PROC_SBY_STATE

E10_FROM_SBY_STATE

E10_TO_SBY_STATE

NUM_QUAL_STARTS

NUM_QUAL_LOTS

NUM_ALARMS

NUM_E10_TO_MFG

INSERTED_TIME

Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* inherited from FPSINPUT.WIP_EVENT_HIST)

IS_ONLY_SDT_SETUP

NONMFG_ETP_STATE_LIST

TOOL_FAILURE_FROM_INST

Time when the entire tool was logged into the UDT state. This is null if this episode does not correspond to a tool-level failure. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_FAILURE_TO_INST

Time when the entire tool was logged out of the UDT state. This is null if this episode does not correspond to a tool-level failure. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

E10_STATE_BEFORE

E10_STATE_AFTER

TOOL_SERVICE_FROM_INST

Time when the entire tool was logged into the SDT state. This is null if this episode does not correspond to a tool-level service. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_SERVICE_TO_INST

Time when the entire tool was logged out of the SDT state. This is null if this episode does not correspond to a tool-level service. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_DOWNTIME_FROM_INST

Time when the entire tool was logged into either the SDT or UDT state (continuous downtime). This is null if this episode does not correspond to a tool-level downtime. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_DOWNTIME_TO_INST

Time when the entire tool was logged out of continuous downtime into a state other than SDT or UDT. This is null if this episode does not correspond to a tool-level downtime. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

GTG_EPISODE_FROM_INST

The time when the current series of ETP_MNT_EPISODES started and should be considered part of the same Green-to-green (GTG) time. (* inherited from FPSBASE.ETP_STATUS)

FIRST_TIME_RIGHT_U

FIRST_TIME_RIGHT_P

FTR_COMMENT_P

FTR_COMMENT_U

FTRU_END_INST