FPSBASE.WIP_CURR_LOTS_TOOLS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

ALLOWED_TOOL_LIST_FOR_BEST

VARCHAR2(512)

CH_ALLOWED

VARCHAR2(24)

List of chambers allowed using the single character CH from EQP_CHAMBERS. While the concepts of cap_entity (capacity entity) and ch_type are important to our logic we agreed that there is no RMS or EI or MES on the planet that understands these concepts. All of these systems go by tool and chambers allowed and therefore our input tables must do the same. We list all chambers that can run and then calculate subsets of these chambers based on CH_TYPE. If all chambers are the same type then we assume you can run on any one or more of the chambers allowed. If the chambers are different types then we assume that at least one chamber of each type is required to run. If you populate either RTG_TOOL_ASGN_LOT_xxx_PATH table then you can leave ch_allowed blank since it will not be used. However there is nothing wrong with populating ch_allowed as a backup plan. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

CURR_PRIORITY

VARCHAR2(7)

N

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_REASON

VARCHAR2(128)

An optional description of why the priority is set as it is. This is typically shown as additional information on pages related to priority lots. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_RANK

VARCHAR2(1)

N

Current rank is dynamically calculated based on the permanent rank, temporary rank, external rank, and current conditions like tool status and current setup. Cases when it is greater than permanent rank include when the required setup does not match or when APC thread is not qualified. The only way it could be less are when either the temporary rank or external rank are set. Curr_rank is populated in WIP_EVENT_HIST for each event logged to a tool by trigger with the value from WIP_STEP_FUT_ASSIGNMENTS at the time of the event. (* from FPSBASE.WIP_LOT_HIST)

CURR_RANK_DISPLAY

VARCHAR2(24)

N

CURR_RANK_LONG_DETAILS

VARCHAR2(512)

CURR_RANK_SORT

NUMBER(3)

N

ECT_STATE_IF_WAIT

VARCHAR2(12)

EST_CH_USED

VARCHAR2(24)

Estimate of which chambers will used to process this lot based on assignments and status (* from FPSBASE.WIP_LOT_HIST)

IS_BEST_TOOL_FOR_LOT

CHAR(1)

N

IS_BY_LOT

CHAR(1)

N

NUM_TOOLS_DOWN_NOT_BLOCKED

NUMBER(3)

N

NUM_TOOLS_WAIT

NUMBER(3)

N

PROC_STATE_IF_WAIT

VARCHAR2(5)

N

SCHED_GROUP_OF_TOOL_IF_OTHER

VARCHAR2(36)

SCHED_RECIPE

VARCHAR2(100)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

SUFFIX_FOR_DOWN

VARCHAR2(1)

SUFFIX_FOR_DOWN_CONCAT

VARCHAR2(5)

USE_IN_SCHED

CHAR(1)

N

WAIT_SEC_TO_SCHED_QUEUE

NUMBER(7)