FPSAPP.DASH_P_ETP_ENTITY_E10_W_H

START_WEEK

Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* inherited from FPSINPUT.CAL_WORK_WEEKS)

END_WEEK

It is critical that this field equal the start_week of the next work work. (* inherited from FPSINPUT.CAL_WORK_WEEKS)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

E10_TOTAL_ENTITIES

E10_NST

E10_UDT

E10_UDT_WO_WAITS

E10_E_UDT

E10_UDT_ENTITIES

E10_E_UDT_ENTITIES

E10_UDT_WO_WAITS_ENTITIES

E10_UDT_QUAL_ENTITIES

E10_SDT

E10_SDT_WO_WAITS

E10_E_SDT

E10_SDT_ENTITIES

E10_E_SDT_ENTITIES

E10_SDT_PM_ENTITIES

E10_SDT_QUAL_ENTITIES

E10_ENG

E10_PRD

E10_SBY

E10_MFG

E10_EQP_UP

E10_EQP_DOWN

E10_OPER

E10_E_OPER

N_UDT_EPISODES

N_E_UDT_EPISODES

N_UDT_P_EPISODES

N_E_UDT_P_EPISODES

N_UDT_EPISODES_ENTITIES

N_E_UDT_EPISODES_ENTITIES

N_UDT_P_EPISODES_ENTITIES

N_SDT_EPISODES

N_E_SDT_EPISODES

N_SDT_P_EPISODES

N_SDT_EPISODES_ENTITIES

N_SDT_P_EPISODES_ENTITIES

N_E_SDT_EPISODES_ENTITIES

N_PM_EPISODES_ENTITIES

N_CDT_EPISODES

N_CDT_EPISODES_ENTITIES

N_ONLY_ALARMS

N_ONLY_QUALS

N_QUALS

UNITS