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FPSBASE.EQP_CH_RECIPE_HIST

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FPSBASE Tables

> FPSBASE.EQP_CH_RECIPE_HIST

Table FPSBASE.EQP_CH_RECIPE_HIST"

Current recipe(est_machine_recipe) for those entities where recipe is applicable. The CURR_RECIPE needs to match the EST_MACHINE_RECIPE in order for the recipe to be able to run on the entity.

  • Schema: FPSBASE

  • Tablespace: FPSDATAHIST

  • Primary key: RECIPE_CHG_INST, FACILITY, TOOL, ENTITY

  • Foreign keys: EQP_CH_RECIPE_HIST_FK_TOOL: FACILITY, TOOL REFERENCES FPSINPUT.EQP_TOOLS (FACILITY, TOOL)


Column

Type

Nullable

Comment

RECIPE_CHG_INST

DATE

N

Time when the recipe change occurred.

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

ENTITY

VARCHAR2(19)

N

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

CURR_RECIPE

VARCHAR2(100)

N

The current/last used recipe for the scheduler, incorporating the ignore capability from EQP_PROCESS_CHG_TO_IGNORE (* from FPSBASE.ETP_STATUS)

LAST_LOT_LAST_BEGIN

VARCHAR2(32)

NUM_LOTS_SINCE_LAST_CHG

NUMBER(8)

N

QTY_SINCE_LAST_CHG

NUMBER(12)

N