FPSINPUT.SCH_P_CONFORMANCE_SUMMARY

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

ACTUAL_MACHINE_RECIPE

Machine recipe used to process the lot as logged during processing by the tool. (* inherited from FPSINPUT.WIP_EVENT_HIST)

OPERATOR

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* inherited from FPSINPUT.WIP_EVENT_HIST)

SHIFT

Name of shift must be unique and can be in any format as long as it is display friendly since this is what we show everywhere. We prefer that other tables should reference start_shift rather than shift in case we want to change the naming convention for the shift. (* inherited from FPSINPUT.CAL_SHIFTS)

STEP_ENT_INST

Time when the lot entered the step. (* inherited from FPSBASE.WIP_LOT_HIST)

DISPATCH_INST

Time when the lot indicated in the MES that it will process on the tool. As opposed to reserve, dispatch cannot be automatically undone. (* inherited from FPSBASE.WIP_STEP_HIST)

BEG_PROC_INST

time when the lot started processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

END_PROC_INST

time when the lot finished processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

STEP_COMP_INST

SHOULD_RESERVE

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROC_TOOL

SCHED_TOOL

the tool from the first lot that scheduled (* inherited from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

PREV_SCHED_TOOL

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

SCHED_COMMENT

CONFORMANCE_COUNT

NON_CONFORMANCE_COUNT