Data Dictionary
>
FPSINPUT Tables
> FPSINPUT.EQP_PROCESS_LIMITS
Table FPSINPUT.EQP_PROCESS_LIMITS"
is the configuration table to store the usage limit for the chamber/recipe on the tool
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Schema: FPSINPUT
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Tablespace: FPSDATA
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Primary key: EQP_TYPE, TOOL, LIMIT_TYPE, LIMIT_VALUE, UNIT_TYPE, FACILITY
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Foreign keys: EQP_PRS_LMT_FK_FAC: FACILITY REFERENCES FPSINPUT.GEN_FACILITIES (FACILITY)
|
Column |
Type |
Nullable |
Comment |
|---|---|---|---|
|
EQP_TYPE |
VARCHAR2(50) |
N |
the eqp type for this usage limit |
|
TOOL |
VARCHAR2(16) |
N |
when this is configured at the tool level, then this should be filled in the tool id; otherwise, it should be "NA" |
|
LIMIT_TYPE |
VARCHAR2(64) |
N |
limit type, can only be setup, recipe, recipe_family, recipe_group |
|
LIMIT_VALUE |
VARCHAR2(100) |
N |
the value of this type, for example the value of the recipe |
|
UNIT_TYPE |
VARCHAR2(12) |
N |
unit type is used to determine how to count the usage. only allow wafer, lot, job |
|
FACILITY |
VARCHAR2(6) |
N |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES) |
|
DESCRIPTION |
VARCHAR2(256) |
the description of this process limits |
|
|
ENTITY_TYPE |
VARCHAR2(12) |
entity type, only allow chamber, tool |
|
|
MAX_ALLOWED_PER_UNIT |
NUMBER(4) |
the maximun allowable per unit |
|
|
MIN_RQD_PER_UNIT |
NUMBER(11,2) |
the minimum required quantities/pct to run one unit |
|
|
UPDATED_INST |
DATE |
Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES) |
|
|
USAGE_PER_UNIT |
NUMBER(11 |
the usage to run one unit |