FPSINPUT.SCH_P_RPT_DURABLES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

DURABLE_CLASS

The class of the durable becomes important when we have multiple durables assigned in RTG_DURABLE_ASSIGNMENTS. If these durables are in different classes then we know that both of them are required. For example, a tester might require both a probe card and an electrical board. If these durables are in the same class then we use the is_multiple_required field to determine whether we will choose either or need both. (* inherited from FPSINPUT.RTG_DURABLE_CLASSES)

DURABLE_GROUP

Durable group is the parent of family and the child of class and its only use is to track the time to change durables. In many cases, group will be the same as class. An example where group would be different than class is where we have different reticles for different stepper manufacturers so the durable_group would be Nikon or Canon or ASML while the durable_class would be DURABLE. (* inherited from FPSINPUT.RTG_DURABLE_GROUPS)

DURABLE_FAMILY

Durable_family indicates what durable is required by the process. When multiple durables are in a family any of them can be used. Typically there is only one reticle per family and therefore the durable and durable_family are the same. The exception would be a high running product with backup reticles. However for probe cards it is common to have several cards for each product so we have several durables with the same family. (* inherited from FPSINPUT.RTG_DURABLE_FAMILIES)

DURABLE

Durables are either reticles for Litho or probe cards for Wet or Sort. A durable can either be in a carrier or at a location without a carrier. (* inherited from FPSINPUT.RTG_DURABLES)

DURABLE_AVAILABILITY

UNAVAILABLE_SEC

DURABLE_STATE_DISPLAY

The name of the durable state displayed on all dashboards and reports. Durable_state must match the FPS list defined in MHS_DURABLE_STATES but this display field might be formatted in a more familiar way to the users in the facility. (* inherited from FPSINPUT.RTG_DURABLES)

CURR_CARRIER

CURR_SLOT_NUM

CURR_LOCATION

store the curr location of the lot (* inherited from FPSAPP.SCH_W_H_S_LOTS)

CURR_STATION

See column comment on STATION in FPSINPUT.MHS_STATION_ALTERNATES for more information. (* inherited from FPSINPUT.MHS_DELIVERY_NEXT)

CURR_BAY

Current bay of carrier. See column comment on BAY in FPSINPUT.MHS_BAYS for more information. (* inherited from FPSINPUT.MHS_DELIVERY_NEXT)

HOME_TOOL

The optional home tool of the durable is generally where it should return after maintenance or inspection or where we prefer to schedule its use (* inherited from FPSINPUT.RTG_DURABLES)

ASSIGNED_CARRIER_FAMILY

COUNTER_MAX

the maximum usage of this counter (* inherited from FPSINPUT.RTG_PROCESS_COUNTERS)

COUNTER_CURR

Current counter value read at counter_read_inst (* inherited from FPSBASE.EQP_MNT_COUNTER_CURR)

COUNTER_UNITS

Unit for the maintenance counter. Common examples include wafers or hours or kWh. (* inherited from FPSINPUT.EQP_MNT_FUTURE)

DURABLE_TYPE

IS_MULTIPLE_REQUIRED

When more than one durable family of the same durable class is assigned to the same criteria, we use this field to determine whether to choose one or whether we need all. Our default indicated by N is that any of them can be used. Occasionally certain processes require multiple durables of the same group (i.e. double reticles) and you indicate this by setting this column to Y. (* inherited from FPSINPUT.RTG_DURABLE_ASSIGNMENTS)

SCHED_TOOL

the tool from the first lot that scheduled (* inherited from FPSAPP.SCH_W_SCHED_DURABLE_INSPECT)

SCHED_CARRIER

SCHED_IS_RESERVED