FPSAPP.CM_P_ROUTE_STEP_EQP_BY_PRD

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

EFFECTIVE_PASSES

EST_USE_PCT

Estimated use percentage is the percentage of units of this route-step that we expect to run on this eqp_type. Normally we use historical data to calculate this for the Capacity Model but entering a value in the OVR table manually overrides that historical number. (* inherited from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

EST_SMP_PCT

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* inherited from FPSBASE.WIP_GOAL_LOT_SHIFT)

EST_REWORK_PCT

Estimated percentage of lots completing this step which will go to rework. This is used for capacity modeling. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

LINE_YIELD_PCT_TO_EOL

Line yield percentage to end of line is the percentage of units expected to successfully complete the remaining steps on the route. Normally we multiply the line yield of all remaining steps for the Capacity Model but entering a value in this OVR table manually overrides that calculated number. (* inherited from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

STEP_SEC_LONG_WAVG_TO_EOL

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

SPEC_ID

This column references the name of the specification used to process lots at this step. Unlike script_id, this column is not used for any FPS purpose other than reference and display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

SEQ_NUM

Sequence number of step in route (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

EST_MACHINE_RECIPE

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* inherited from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

LOGICAL_RECIPE

Used for infomational purpose and is populated if known otherwise it will match the recipe. (* inherited from FPSINPUT.WIP_EVENT_HIST)

FIRST_UNIT_SEC

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* inherited from FPSINPUT.THP_EXTERNAL)

UNIT_INT_SEC

MPU

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* inherited from FPSBASE.WIP_LOT_HIST)

UPH

UPH is a commonly used abbreviation which stands for units per hour. It is often referred to as WPH which for wafers per hour but UPH is better because the unit is not always wafer. (* inherited from FPSBASE.RTG_PROCESS_RCP_EQPTYPES)

EFF_MPW

THP_FILLIN_GROUP

ACTUAL_ROUTE

ROUTE_FAMILY

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* inherited from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* inherited from FPSINPUT.RTG_ROUTE_GROUPS)