FPSINPUT.RTG_ROUTE_STEPS_PLUS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

ALWAYS_ALLOW_Q_WHEN_DOWN

CHAR(1)

N

Normally we do not allow lots to start at the first step in a queue timer sequence if there is a step in the sequence that has no tools available. But if this flag is set to Y then we will allow lots to start even when all tools are down at this process. Typically this is used for a process that we know we can skip but the est_smp_pct might be above the smp_pct_to_allow_q_when_down threshold set for the facility in GEN_FACILITIES. (* from FPSINPUT.RTG_PROCESSES)

BATCH_INT_SEC

NUMBER(6)

CARR_CATEGORY_RQD

VARCHAR2(17)

Required carrier category which if set must match carr_category in MHS_CARRIERS (* from FPSINPUT.RTG_DURABLES)

COMMIT_STEP_SEC

NUMBER(7)

COMMIT_STEP_SEC_TO_EOL

NUMBER(11)

COMMON_STEP

VARCHAR2(50)

N

A display-friendly field that groups similar steps together for purposes of viewing the entire line. Typically the only duplicates within a single route will be optional ordered steps in the same segment. But we will often have steps across routes that share the same common step even though exact step definition is not identical. (* from FPSINPUT.RTG_COMMON_STEPS)

COMMON_STEP_SORT

NUMBER(7,2)

How to sort common_step when displaying together for multiple routes in the same view. This must be unique for the entire facility so that we know how to order common_step when viewing the entire facility. (* from FPSINPUT.RTG_COMMON_STEPS)

COMMON_STEP_SORT_IN_RT_FAM_SEG

NUMBER(7,2)

COUNT_AS_OPER_MOVE

CHAR(1)

N

If the use_count_as_oper_move_flag is set to Y in GEN_FACILITIES then we use this flag to determine oper moves instead of using moves from one operation to another. (* from FPSINPUT.RTG_ROUTE_STEPS)

CURR_WIP_QTY_ON_ROUTE

NUMBER(7)

DO_NOT_COUNT_OPER_MOVE_FROM

CHAR(1)

N

We might never want to count oper moves from certain special operations like staging or adhoc. (* from FPSINPUT.RTG_OPERATIONS)

DO_NOT_COUNT_OPER_MOVE_TO

CHAR(1)

N

We might never want to count oper moves to certain special operations like staging or adhoc (* from FPSINPUT.RTG_OPERATIONS)

EET_SEC

NUMBER(7)

N

End-to-end time in seconds (* from FPSBASE.WIP_LOT_HIST)

ENDED_SEC_COMP_FULL_WAVG

NUMBER(7)

ENDED_SEC_FROM_THP

NUMBER(7)

EQP_TYPE

VARCHAR2(50)

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

EST_LINE_YIELD_PCT

NUMBER(6,3)

N

Estimated line yield percent for the route-step. Leave blank for the default of no loss expected. A value of 99.5 means we expected 1 unit out of 200 to be lost. (* from FPSINPUT.RTG_ROUTE_STEPS)

EST_REWORK_PCT

NUMBER(5,3)

N

Estimated percentage of lots completing this step which will go to rework. This is used for capacity modeling. (* from FPSINPUT.RTG_ROUTE_STEPS)

EST_SMP_PCT

NUMBER(5,2)

N

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

FACILITY_SEGMENT

VARCHAR2(36)

Facility segment is the parent of common step and is used as the highest level grouping when we show WIP for a route group or the entire facility where we cannot use route segment. We would prefer somewhere between 8 and 20 facility segments. Typically we will have to define these (as opposed to route_segment which we will typically come from the MES). There is no RTG_FACILITY_SEGMENTS table because sorting of facility segments is determined by common_step_sort. A trigger on RTG_COMMON_STEPS ensures that facility segments are contiguous when the entire facility is sorted by common step. (* from FPSINPUT.RTG_COMMON_STEPS)

FACILITY_SEGMENT_SORT

NUMBER(4)

FILL_IN_RECIPE

VARCHAR2(100)

One example use of this column is that we may set it to SLOW, MED, FAST to use as default for new recipes and then we would manually populate SLOW, MED, FAST recipe data for each EQP_TYPE in RTG_RECIPE_EQPTYPES. (* from FPSINPUT.RTG_PROCESSES)

FIRST_SEQ_NUM_OF_SCHED_GROUP

NUMBER(7,2)

N

FIRST_UNIT_SEC

NUMBER(9,3)

N

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

FUTURE_WIP_STEP

VARCHAR2(256)

FUTURE_WIP_STEP is for sequenced operations. The most common is the Diffusion clean-furnace sequence. Lots for the furnace always wait at the sink so there is technically never any WIP at the furnace operation. But we do not want to count it as Sby No WIP if there is WIP available at the sink. This tells us to link the steps so that we will report Standby Wip At Previous Related Step. (* from FPSINPUT.RTG_ROUTE_STEPS)

GP_ARRV_CUTOFF_SEC

NUMBER(5)

N

GP_SUBFAMILY

VARCHAR2(58)

GP_subfamily is used for Goal Planner and is an extension of process_family which can additionally include lot_group and an additional suffix. We populate GP_subfamily automatically based on process_family, process_subfamily, gp_subfamily_suffix, and add_lotgrp_to_gp_subfamily using the function GET_GP_SUBFAMILY. We build this starting with nvl(process_subfamily, process_family) followed by gp_subfamily_suffix if populated then followed by lot_group if add_lotgrp_to_gp_subfamily is set to Y. It is possible to have one or two or three parts. You might have values for process_family/process_subfamily/gp_subfamily_suffix/add_lotgrp of Furn/blank/blank/Y and that would give you gp_subfamilies of Furn/Prod and Furn/Dev. Or Furn/HighTemp/blank/Y would give you HighTemp/Prod and HighTemp/Dev. Or Sink/blank/FeedsOxFurn/N would give you Sink/FeedsOxFurn. And so on. (* from FPSBASE.WIP_END_SHIFT_HIST)

GP_SUBFAMILY_SUFFIX

VARCHAR2(12)

See comments in GET_GP_SUBFAMILY function. This field is normally blank unless configuration is required for Goal Planner. (* from FPSINPUT.RTG_PROCESSES)

HIDE_FUT_IN_LOT_STEP_SUMMARY

CHAR(1)

N

Indicates whether future step records will be hidden in the Dashboard Lot History Summary table. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_EXCLUDED_LINE_BALANCE

CHAR(1)

N

Lots on hold are excluded from line balance calculations if this flag for the hold type is set to Y. By default this is N which means that lots on hold of this type are included in line balance calculations. (* from FPSINPUT.WIP_HOLD_TYPES)

IS_FROM_MSO_PROCESS

CHAR(1)

N

IS_IGNORE_MOVABLE_TURNS

CHAR(1)

N

Movable turns differs from our standard turns calculation in that we ignore steps where lots are not expected to move like staging steps or logistics steps. Like is_ignore_turns, this flag can be set in either RTG_OPERATION_FAMILIES, RTG_PROCESSES, or RTG_LINE_SECTIONS. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_IGNORE_MOVES

CHAR(1)

N

This flag is in both RTG_OPERATION_FAMILIES and RTG_PROCESSES. If the value is Y for the operation family then we do not count moves from those operations as oper moves. If the value is Y for either the operation family or the process then we do not count moves from the route-step as completes even if our normal logic suggests that it should be a complete. This logic can cause confusion so here are a few important notes. 1) Dashboard does not read the is_ignore_moves flag therefore we must set move_type to DSKIP rather than COMP and we must set is_oper_move to N in order to ignore the move. 2) This flag is often used for staging steps but it is independent of the is_staging_step flag so if you want to ignore staging steps then you need to set these flags appropriately. 3) The flag in RTG_PROCESSES does not directly affect the oper moves but it does affect it indirectly if the is_comp_rqd_for_oper_move is set to Y. In that case, if the only move during the operation is for a process which is ignored then we do not have a complete during the operation and therefore will not count the move from the operation as an oper move since a complete is required. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_IGNORE_OPER_MOVES

CHAR(1)

N

IS_IGNORE_TURNS

CHAR(1)

N

This flag is in RTG_OPERATION_FAMILIES, RTG_PROCESSES, and RTG_LINE_SECTIONS. If this flag is Y in any of the three tables then we do not count turns at the route-step towards the total for the facility. We also ignore turns at route-steps where we ignore WIP and/or moves which makes sense since turns is moves divided by WIP. Finally we ignore turns for certain line sections towards the facility average. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_IGNORE_WIP

CHAR(1)

N

This flag is in both RTG_OPERATION_FAMILIES and RTG_PROCESSES. If the value is Y for either the operation family or the process then we do not count WIP at the route-step towards the total for the facility. Typically this is set for staging operations. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_INACTIVE_STEP

CHAR(1)

N

Since we now use RTG_ROUTE_STEPS_INACTIVE table, we should only include the active steps on each route in RTG_ROUTE_STEPS. Therefore this value must be set to N in the RTG_ROUTE_STEPS table but will be set appropriately to Y for inactive steps in the RTG_ROUTE_STEPS_PLUS table. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_LAST_STEP_OPERATION

CHAR(1)

N

If Y then this step is the last step in an operation. By completing this step, the lot will move to a different operation which is usually the primary criteria to be counted as an oper move.

IS_MAIN_ROUTE

CHAR(1)

N

Y indicates the route is the main processing route for PRD. N indicates it is a rework or alternate route. (* from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

IS_MSO_ALLOWED_SUB

CHAR(1)

N

Flag indicating whether this step can be used as a process sub in the MSO application. This flag is only used by the UI for filtering purposes. A process sub is a metrology process that we cannot make a skip / take decision on, but can be run to clear counters. (* from FPSINPUT.RTG_MSO_PROCESSES)

IS_MSO_SKIPPABLE

CHAR(1)

N

Flag indicating whether this step is allowed to be skipped by the MSO application. This flag controls the options for TO_MSO_PROCESS in the UI and it serves as a last check before sending a skip decision to the MES. Setting the flag to N will keep it from ever being sent as a skip step and will not show it as a Sample step in the UI (* from FPSINPUT.RTG_MSO_PROCESSES)

IS_SAMPLE

CHAR(1)

N

If Y then lots are allowed to skip this process (* from FPSINPUT.RTG_PROCESSES)

IS_STAGING_STEP

CHAR(1)

N

We expect large amounts of WIP and long cycle times at staging steps. We still calculate cycle time like any other step but the important difference is that lots currently at a staging step are not counted as normal coming lots to future steps. Instead we show them in a special column labeled From Staging. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_TO_MSO_PROCESS

CHAR(1)

N

IS_TW_ONLY

CHAR(1)

N

IS_TW_ONLY indicates that a PRD or ROUTE has only test wafer lots. This flag is slightly different than IS_TW, which is associated with lots via their LOT_GROUP. Some PRDS/ROUTEs are mixed and this is set to N if there are any non-TW lots. (* from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

IS_TW_USE

CHAR(1)

N

Applicable to TW routes only. If N (default), then this step is part of the process of building the test wafer. If Y, then this step is one at which the TW is used for process characterization by the owning module. (* from FPSINPUT.RTG_ROUTE_STEPS)

LINE_SECTION

VARCHAR2(32)

N

Large grouping of the line, e.g. FEOL, BEOL, Cu, etc. There should be only a handful of values for the entire facility - or if the facility only has one section then we can leave this column blank. (* from FPSINPUT.RTG_LINE_SECTIONS)

LINE_YIELD_PCT_TO_EOL

NUMBER(6,3)

N

Line yield percentage to end of line is the percentage of units expected to successfully complete the remaining steps on the route. Normally we multiply the line yield of all remaining steps for the Capacity Model but entering a value in this OVR table manually overrides that calculated number. (* from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

MAX_STEP_SEC

NUMBER(7)

This is a cap on the cycle time for steps in this process family. The most common use is for a process family which has historically been bad but we do not want the cycle time to show that. We hesitated on capping the historical numbers and prefer to only cap commit and target but we somewhat reluctantly agreed to cap history too. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MODE_BUILDING

VARCHAR2(12)

MODE_EST_MACHINE_RECIPE

VARCHAR2(100)

MODE_RQD_SETUP

VARCHAR2(100)

MOVE_TO_BANK

VARCHAR2(36)

If this step moves the lot to a bank then populate this with the name of the bank. Typically this is the last step on a production route but it can be in the middle of the route as well. (* from FPSINPUT.RTG_ROUTE_STEPS)

MPU

NUMBER(8,4)

N

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* from FPSBASE.WIP_LOT_HIST)

MSO_PROCESS

VARCHAR2(100)

N

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts (* from FPSINPUT.RTG_ROUTE_STEPS)

NEXT_STEP

VARCHAR2(256)

Event moved the lot to this new step (* from FPSINPUT.WIP_EVENT_HIST)

NUM_STEPS_IN_SEGMENT

NUMBER(4)

OPERATION

VARCHAR2(50)

N

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

OPERATION_DESCRIPTION

VARCHAR2(128)

OPERATION_DISPLAY

VARCHAR2(50)

N

All xxx_display columns are used in place of the column xxx for display purposes. The values of these columns can be changed at any time without having to worry about other tables referencing it. (* from FPSINPUT.RTG_OPERATIONS)

OPERATION_FAMILY

VARCHAR2(36)

Grouping of route-step that is completely dependent on routing information from MES. The primary use of this field is for filtering on Operations Dashboard. Unfortunately for our database structure and naming convention, this field no longer has any link to operation. This is because operation is used primarily for Oper Moves and it is normal for steps in an operation to belong to multiple MES routing groups. For example, a sink step and a furnace step and a measurement step are in the same operation but each step belongs to the appropriate sink/furnace/measurement MES routing groups which we store in operation family. Since Dashboard already uses both operation and operation_family extensively and independently, we decided not to rename either column but simply remove the link. Please note that operation family is similar to process family and in fact they are often the same. The key differences are that operation family has nothing to do with equipment and that comes straight from ETL with no complex logic. Process family is the link between routing and equipment for the Operations Dashboard and therefore has complex logic. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

OPERATION_MODULE

VARCHAR2(12)

OPER_SORT_ORDER_IN_DASH

NUMBER(5)

ORIG_FACILITY

VARCHAR2(6)

See comments in OTHER_FACILITY column (* from FPSINPUT.RTG_ROUTE_STEPS)

ORIG_FAC_ROUTE

VARCHAR2(256)

See comments in OTHER_FACILITY column (* from FPSINPUT.RTG_ROUTE_STEPS)

OTHER_FACILITY

VARCHAR2(6)

Used if the step is actually processed in another facility. For example, a lot may go to the Test facility for an electrical test in the middle of the Fab route. In this case, on the Fab route OTHER_FACILITY is set to Test. In the Test facility there will be a fake short route with only this single step and the ORIG_FACILITY and ORIG_FAC_ROUTE will be set to the name of the Fab facility and the Fab route. This case is distinguished by non-NULL values in ORIG_FACILITY, OTHER_FACILITY, and ORIG_FAC_ROUTE columns. (* from FPSINPUT.RTG_ROUTE_STEPS)

OVERALL_ROUTE_SEGMENT_SORT

NUMBER(6)

OVR_COMMIT_STEP_SEC

NUMBER(7)

See comments in OVR_TARGET_STEP_SEC column. (* from FPSINPUT.RTG_ROUTE_STEPS)

OVR_STEP_SEC_FOR_FUT

NUMBER(7)

For WIP_STEP_FUTURE cycle time predictions, we normally use the automatically calculated cycle time from CTM_SUMMARY as configured in ctm_column_for_wip_step_fut from GEN_FACILITIES (i.e. FULL, COMMIT, 7D_MED, 2D_WAVG, etc.). The ovr_step_sec_for_fut columns in RRS and WIP_STEP_FUTURE_OVR allow us to override this value with a manual value for a specified route-step or a specified lot-route-step. The ovr column from RRS is used in the CTM_SUMMARY logic so it will be the value of step_sec_nohold_for_wsf and step_sec_for_wsf_if_take in CTM_SUMMARY and RTG_ROUTE_STEPS_PLUS as well as the value in WIP_STEP_FUTURE. The ovr column from WSF_OVR is specific to the lot and therefore is only used in UPDATE_WIP_STEP_FUTURE so you will only see this value in WIP_STEP_FUTURE. In addition, a value in WSF_OVR indicates that the lot will TAKE at this step. If both are populated, WSF will use the more specific value by lot from WSF_OVR. The most common use of this column is to override the 10 second default for staging steps used by the Scheduler. Other than staging steps, we recommend using these overrides rarely. (* from FPSINPUT.RTG_ROUTE_STEPS)

OVR_TARGET_STEP_SEC

NUMBER(7)

We normally automatically calculate commit/target cycle times by weighting across steps based on historical information so that the total for the route equals the specified total for commit/target in RTG_PRDS. This column along with ovr_commit_step_sec allows us to override that automated calculation for certain route-steps with a specific value. We encourage leaving these columns blank. (* from FPSINPUT.RTG_ROUTE_STEPS)

PHOTO_LAYER

VARCHAR2(12)

The photo layer the step belongs to. (* from FPSINPUT.RTG_ROUTE_STEPS)

PREV_ACTIVE_SMP_PROCESS

VARCHAR2(50)

PREV_STEP

VARCHAR2(256)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_ADDL_INFO

VARCHAR2(50)

Additional information on the process which we show on the Dashboard process summary. For example, the most common machine recipe. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_DESCRIPTION

VARCHAR2(128)

PROCESS_DISPLAY

VARCHAR2(50)

N

The name of the process displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the process. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_GROUP

VARCHAR2(36)

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_MODULE

VARCHAR2(12)

N

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module.

PROCESS_SORT_ORDER_IN_DASH

NUMBER(5)

PROCESS_SUBFAMILY

VARCHAR2(100)

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily.

PROC_SEC_COMP_FULL_WAVG

NUMBER(7)

RCP_EXP_QTY_PER_BATCH

NUMBER(3)

RCP_MAX_BATCH_SIZE_CARRIERS

NUMBER(2)

RECURSIVE_LEVEL

NUMBER(2)

Levels of segments within a section (* from FPSINPUT.RTG_ROUTE_STEPS)

REVERSE_SEQ_NUM

NUMBER(7,2)

N

ROUTE_FAMILY

VARCHAR2(36)

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_FAMILY_SCORE

NUMBER(2)

Scheduler Evaluation slider value for route family priority slider (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

VARCHAR2(36)

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* from FPSINPUT.RTG_ROUTE_GROUPS)

ROUTE_REMAINING_DETAILS

VARCHAR2(128)

ROUTE_REMAINING_PCT

NUMBER(5,3)

ROUTE_SCORE

NUMBER(2)

Scheduler Evaluation slider value for route priority slider (* from FPSINPUT.RTG_ROUTES)

ROUTE_SECTION

VARCHAR2(32)

A large grouping of route steps used for line balance and should be set to contain at least a week of steps based on cycle time. Line balance uses this grouping instead of segment so that it can be configured independently from segment which is used in the Dashboard for display purposes, but they can also be set the same if desired. The section should be large in order to minimize the impact of short-term WIP distribution changes on step WIP targets because line balance calculates step WIP targets based on the WIP currently in each section. (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE_SECTION_SORT

NUMBER(6)

Sequence number of route segment within a section (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE_SEGMENT_SORT

NUMBER(6)

RTG_PARM1

VARCHAR2(128)

RTG_PARM2

VARCHAR2(128)

RTG_PARM3

VARCHAR2(128)

RTG_PARM4

VARCHAR2(128)

RTG_PARM5

VARCHAR2(128)

SCHED_GROUP

VARCHAR2(36)

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* from FPSINPUT.RTG_PROCESS_GROUPS)

SCH_CUSTOM_TARGET

NUMBER(5,2)

This is a numeric value that can be passed to the Scheduler for use in scoring lots. It will be the value used in the CUSTOM TARGET scoring evaluation (* from FPSINPUT.RTG_ROUTE_STEPS)

SCRIPT_ID

VARCHAR2(36)

This column references the name of script used to process lots at this step. Different MES use different terminology but the key to this column is its use to determine batches. Lots with the same script_id and same batch_criteria from RTG_TOOL_ASSIGNMENTS can be batched together. Therefore this is critical column for scheduling on batch tools. (* from FPSINPUT.RTG_ROUTE_STEPS)

SEQ_NUM

NUMBER(7,2)

N

Sequence number of step in route (* from FPSINPUT.RTG_ROUTE_STEPS)

SPEC_ID

VARCHAR2(36)

This column references the name of the specification used to process lots at this step. Unlike script_id, this column is not used for any FPS purpose other than reference and display. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_CHOICE_BRANCH

VARCHAR2(256)

See comments for the step_choice_group column. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_CHOICE_GROUP

VARCHAR2(256)

The step choice group and branch columns indicate that each lot must make a choice to visit only one of a group of steps. Both fields must be populated together. Step choice group is just a label to understand the meaning of the group of steps. Step choice branch is the important column indicating to which branch the step belongs. A common example is Litho where we can process on an integrated cell or a standalone track and stepper. Step 100 immediately prior to the Litho would have both fields blank. Step 101 is the integrated cell with step_choice_group set to Litho_Metal_1 and step_choice_branch set to Integrated. Step 102 is the track with step_choice_group set to Litho_Metal_1 and step_choice_branch set to Standalone. Step 103 is the stepper with step_choice_group set to Litho_Metal_1 and step_choice_branch set to Standalone. Step 104 immediately following would have both fields blank. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_SEC_FOR_CRIT_RATIO_TO_EOL

NUMBER(11)

N

STEP_SEC_FOR_DAYS_BEH_TO_EOL

NUMBER(11)

N

STEP_SEC_LONG_WAVG_TO_EOL

NUMBER(11)

N

STEP_SEC_NOHLD_RT_WSF

NUMBER(7)

N

STEP_SEC_NOHLD_RT_WSF_TO_EOL

NUMBER(11)

N

STEP_SEC_RT_FOR_DASH

NUMBER(7)

N

STEP_SEC_RT_FOR_DASH_TO_EOL

NUMBER(11)

N

STEP_SORT_WITHIN_OPER

NUMBER(3)

N

TARGET_STEP_SEC

NUMBER(7)

TARGET_STEP_SEC_TO_EOL

NUMBER(11)

TCT_SEC

NUMBER(7)

N

Theoretical cycle time in seconds (* from FPSBASE.WIP_LOT_HIST)

TCT_SEC_TO_EOL

NUMBER(11)

TOTAL_COMMIT_CT_DAYS

NUMBER(7,3)

TOTAL_TARGET_CT_DAYS

NUMBER(7,3)

TW_USE_PURPOSE

VARCHAR2(16)

Brief definition of the use of test wafers at this step (ex: Etch Rate or Nitride Dum). (* from FPSINPUT.RTG_ROUTE_STEPS)

UNIT_INT_SEC

NUMBER(9,3)

UPH

NUMBER(9,3)

N

UPH is a commonly used abbreviation which stands for units per hour. It is often referred to as WPH which for wafers per hour but UPH is better because the unit is not always wafer. (* from FPSBASE.RTG_PROCESS_RCP_EQPTYPES)