FPSBASE.EQP_TOOL_PORTS

UPDATED_INST

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* inherited from FPSINPUT.GEN_FACILITIES)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

STATION

The rack, bay, building, tool, cart, or stocker which has alternately acceptable stations (* inherited from FPSINPUT.MHS_STATION_ALTERNATES)

PORT

Port is the short name of the port on the tool like P1 or LLA. This field is unique within the given tool and is used to save space when we already know the tool, for example in the dashboard tool hover where we show the status of each port. This column is in contrast to the location field which is the full name of the port. Location is unique within the entire facility and almost always includes the tool name like ET99P1 or ET99LLA. In addition, location is usually available from the MES or AMHS as this must be an exact match with the location in MHS_CARRIERS if this gets set when a carrier is placed on the port. On the other hand, the shorter port column is often not available in the MES so we either populate manually or with some complex if-then logic in the ETL based on the naming standards. (* inherited from FPSINPUT.EQP_PORTS)

LOCATION

Location of a carrier or lot or durable which comes directly from the tracking system used at the site. This could be a port or internal tool location or tool or rack or stocker or zero footprint storage or room or really anywhere. Many non-automated sites allow users to manually enter locations into their system. Therefore unless we know for sure that the source data implements a size limitation, it is recommended to always trim the value in the ETL to 32 characters to fit into the column size and avoid load errors. For ports, location is the full name of the port which is unique across the entire site and usually includes the tool name. Please see the comment in the port column which explains the difference between location and port. Rack locations are similar. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

CARRIER_CLASS

Carrier class indicates what the carrier is able to carry. It is also an important field in EQP_PORTS but each port has a single defined carrier class and only carriers of this class should go to the port. The value must be one of those defined by FPS in FPSADMIN.MHS_CARRIER_CLASSES which include POD or CAST or BOX. This would be used as a filter on what carriers could be selected when a carrier is needed. For example, when a lot is split we need to find another carrier for the split lot and we select the best carrier in the carrier_class of CAST. But if we need to unload a reticle then we select the best carrier in the carrier_class of POD. (* inherited from FPSINPUT.MHS_CARRIERS)

CAPACITY

In EQP_PORTS, capacity is the number of carriers allowed on the port, which is usually 1. In MHS_CARRIERS, when carrier_class is set to POD then capacity is the number of durables that the pod can hold, which is usually either 1 or 6. This field is only used in MHS_CARRIERS for pods therefore when CARRIER_CLASS is CAST then capacity should be set to the default value of 1. (* inherited from FPSINPUT.EQP_PORTS)

PORT_MODE

PORT_MODE is the port equivalent to EQP_STATE. Examples might be AUTOMATIC, MANUAL, SEMI-AUTOMATIC, or DOWN. If configured in GEN_FACILITIES, the view DASH_P_TOOL_PORTS can overlay whether the port is occupied along with its carrier and the WIP processing states over the port modes as long as the port mode has is_up set to Y. Therefore it is not necessary to reflect occupied or empty when developing the ETL logic to populate the EQP_PORTS table. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_MODE_DISPLAY

The name of the port_mode displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the port_mode. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_MODE_OPERATOR

Username of the operator who set the current port mode. (* inherited from FPSINPUT.EQP_PORTS)

IS_UP

This field shows if the port mode of the stations is considered up or down. If all ports are down then rank will be R (Ports Down) and ETP will set the state to SBY-RANKR (Standby With All Ports Down). (* inherited from FPSINPUT.EQP_PORT_MODES)

IS_AUTO

This field shows if the port mode is set to automatically deliver material. If the facility either has automated delivery (aka 300mm) or is using semi-automated delivery (aka NextMove) then a port set to a port_mode where this is N but is_up is Y is considered manual. A manual port means that the delivery system cannot use this port. If all ports are manual then rank will be M (Ports Manual) and ETP will set the state to SBY-RANKM (Standby With All Ports in Manual). In addition, we report auto_pct by summarizing the port states in auto and manual. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_MODE_GROUP

Grouping field of the port mode for reporting. If port modes are not particularly specific then this might be the same as the port mode. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_MODE_GROUP_BG_COLOR

Color assigned to the port_mode_group. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_GROUP

Optional value if tool has different groups of ports, for example 150mm and 200mm. RQD_PORT_GROUP in RTG_TOOL_ASSIGNMENTS indicates what is required for each lot. (* inherited from FPSINPUT.EQP_PORTS)

IS_INTERNAL

Set to Y if the location is internal to the tool. For example, a bath inside a sink. This is critical to NextMove since we cannot direct a carrier to move to this port. (* inherited from FPSINPUT.EQP_PORTS)

IGNORE_FOR_SCHED

Set to Y if the location should be ignored by the Scheduler. Usually this value is the same as is_internal and in fact all ports which are not internal are constrained to not be ignored but occasionally the Scheduler does schedule internal ports such as boats. (* inherited from FPSINPUT.EQP_PORTS)

SHARED_PARENT_TOOL

This indicates that multiple tools share the same physical parent tool even though they operate completely independently. It is critical that the shared_parent_tool not have the same name as the tool or any other tool. Tubes in a furnace are one example. Chambers that are completely independent are another example but we need to be very careful when we define chambers or groups of chambers as separate tools. This should be done when there is no possibility that a lot might run across what we define as tools. (* inherited from FPSINPUT.EQP_TOOLS)

BAY

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* inherited from FPSINPUT.MHS_BAYS)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

MNT_FAMILY

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* inherited from FPSINPUT.EQP_MNT_FAMILIES)

EQP_MODULE

EQP_MODULE is the module responsible for operating the tool. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.EQP_TOOLS_PLUS)

EQP_MODULE_DISPLAY

EQP_MODULE_SORT_ORDER

IS_REAL_TOOL

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* inherited from FPSINPUT.EQP_TYPES)