FPSADMIN.WIP_LOT_HIST

LOT

VARCHAR2(32)

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

INST

DATE

Time when the event occurred. (* from FPSINPUT.WIP_EVENT_HIST)

LOT_SEQ_WITHIN_SEC

NUMBER(6,2)

For rows with identical timestamps, sequence records to get proper sequence (* from FPSINPUT.WIP_EVENT_HIST)

ABORT_INST

DATE

When a lot has begun processing on a tool and an event with event_type of ABORT is logged, abort_inst captures the time of the abort. If multiple aborts happen to the same lot, the last abort_inst is used. See description of ABORT ect_state for more details. (* from FPSBASE.WIP_STEP_HIST)

ACTIVE_CODE

VARCHAR2(1)

ACTUAL_CH_USED

VARCHAR2(24)

Here is where we can log the actual_ch_used directly if we know it. We have three ways to determine actual_ch_used in WIP_LOTS_REALTIME which populates WIP_STEP_HIST: 1) Log it directly in this colum for an event where the logged_entity is the main tool. 2) Log events to each of the chambers used in WIP_EVENT_HIST. 3) Log events to each of the chambers used in WIP_WAFER_HIST. (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_DURABLE_USED

VARCHAR2(129)

Actual durable used as logged by the tool during processing of the lot. This can be a comma delimited string if multiple durables are used. (* from FPSINPUT.WIP_EVENT_HIST)

ACTUAL_MACHINE_RECIPE

VARCHAR2(100)

Machine recipe used to process the lot as logged during processing by the tool. (* from FPSINPUT.WIP_EVENT_HIST)

ALLOWED_TOOL_LIST

VARCHAR2(512)

BANK

VARCHAR2(36)

N

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

BANK_IN_OR_OUT_INST

DATE

N

BATCH_CRITERIA

VARCHAR2(140)

Lots that can run on the same batch TOOL and have the same value of BATCH_CRITERIA can run together in a batch. Therefore this is a critical column for scheduling on batch tools. If BATCH_CRITERIA is not populated, Scheduler defaults to the assumption that any WIP with the same EST_MACHINE_RECIPE can be batched together. Keep in mind that many MESs have additional constraints on batching (for example, that all WIP in a batch has the same SCRIPT_ID) and these must be incorporated into BATCH_CRITERIA to ensure that the batches are allowed by the MES. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

BEG_PROC_INST

DATE

time when the lot started processing on the main tool. (* from FPSINPUT.WIP_STEP_HIST_MANUAL)

BEG_PROC_INST_AUTO

DATE

BEST_CURR_RANK_LONG_DETAILS

VARCHAR2(512)

BEST_TOOL

VARCHAR2(16)

BLOCK_SEC_COMP_FOR_WSF

NUMBER(7)

CANCEL_INST

DATE

Time when tool reservation or dispatch or perhaps even load or ready for the lot at the current step was cancelled. After cancel_inst the lot is available to any qualified tool immediately. (* from FPSBASE.WIP_STEP_HIST)

CARRIER

VARCHAR2(32)

RFID of the cassette or FOUP the lot is currently in. (* from FPSINPUT.MHS_CARRIERS)

CARRIERS_IN_JOB

NUMBER(2)

Set to the number of carriers in the job. The value in WIP_EVENT_HIST represents the number of carriers which have started processing in this job *so far*, while the value in WIP_STEP_HIST (written after the job completes processing) represents the total number of carriers in the job.

CARRIER_INST

DATE

When the carrier was last populated with the event. Since we carry over the previous value of carrier we need to know this to compare to the updated_inst in WIP_LOTS_STATIC and use the newest information for carrier.

CH_USED_DISP_SUFFIX

VARCHAR2(256)

CURR_PRIORITY

VARCHAR2(7)

N

The priority at the current step. As the lot moves along the route after LAST_STEP_CURR_PRTY it will revert to PLAN_PRIORITY. For example, timelink or sendahead priority is only temporary. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_PRIORITY_REASON

VARCHAR2(128)

An optional description of why the priority is set as it is. This is typically shown as additional information on pages related to priority lots. (* from FPSINPUT.WIP_LOTS_STATIC)

CURR_RANK

VARCHAR2(1)

Current rank is dynamically calculated based on the permanent rank, temporary rank, external rank, and current conditions like tool status and current setup. Cases when it is greater than permanent rank include when the required setup does not match or when APC thread is not qualified. The only way it could be less are when either the temporary rank or external rank are set. Curr_rank is populated in WIP_EVENT_HIST for each event logged to a tool by trigger with the value from WIP_STEP_FUT_ASSIGNMENTS at the time of the event.

DISPATCHED_BY

VARCHAR2(64)

DISPATCH_INST

DATE

Time when the lot indicated in the MES that it will process on the tool. As opposed to reserve, dispatch cannot be automatically undone. (* from FPSBASE.WIP_STEP_HIST)

DISP_SEC_COMP_FOR_WSF

NUMBER(7)

DURABLE_THP_VARIATION

VARCHAR2(64)

When this column is populated that means that we have a choice of durable families and that processing time for the lot/recipe depends on which durable family is chosen. The most common use case is 8 pin and 16 pin probe cards. This will be blank for reticles and other cases where the throughput is not dependent on the durable. This is part of the primary key of our throughput logic where nulls are filled in as NA since PK columns cannot be null. In our first example, we have a recipe WAFER_TEST_1 that we use for a whole bunch of different prds. Each prd requires its own probe card but for throughput purposes we do not care about the prd. We just care about the recipe which is WAFER_TEST_1 and we would set duration_thp_variation to 8pin or 16pin. Then we would group all prds that use WAFER_TEST_1 and ran with an 8 pin probe card together in the same THP record. Our second example is similar to the first but for throughput purposes each prd will be different. We would set duration_thp_variation to the durable family for this case. In our third example, the recipe is different for each prd. In this case, we would set duration_thp_variation to either 8pin and 16pin or to the durable family and get the same result. (* from FPSINPUT.RTG_DURABLE_FAMILIES)

ECT_FROM_INST

DATE

ECT_HIST_SEQ_WITHIN_SEC

NUMBER(4)

ECT_STATE

VARCHAR2(42)

N

ECT state is the lowest level state of our Enhanced Cycle Time hierarchy and the value which is stored in WIP_LOTS_REALTIME and ECT_HIST. We can lookup all information about the ECT state including process state in ECT_STATE_DIAGRAM. (* from FPSADMIN.WIP_ECT_STATES)

ECT_STATE_CHG_EVENT

VARCHAR2(48)

N

ECT_STATE_CHG_EVENT_TYPE

VARCHAR2(12)

N

ECT_STATE_CHG_INST

DATE

N

ECT_STATE_IF_DISP_WOUT_MHS

VARCHAR2(12)

ECT_STATE_IF_WAIT

VARCHAR2(12)

N

ECT_TO_INST

DATE

See comments on WIP_LOT_HIST.NEXT_INST. (* from FPSBASE.ECT_HIST)

ECT_TO_INST_NOT_NULL

DATE

See column comments for WIP_LOT_HIST.NEXT_INST. (* from FPSBASE.ECT_HIST)

ECT_UPDATED_BY

VARCHAR2(30)

N

ECT_UPDATED_COMMENT

VARCHAR2(512)

ECT_UPDATED_TIME

TIMESTAMP(6)

N

EET_SEC

NUMBER(7)

End-to-end time in seconds

END_PROC_INST

DATE

time when the lot finished processing on the main tool. (* from FPSINPUT.WIP_STEP_HIST_MANUAL)

END_PROC_INST_AUTO

DATE

EQP_TYPE_OF_RS

VARCHAR2(50)

EQP_TYPE_OF_TOOL

VARCHAR2(50)

EST_CH_USED

VARCHAR2(24)

Estimate of which chambers will used to process this lot based on assignments and status

EST_DURABLE_USED

VARCHAR2(129)

This field is populated with our estimate of what durable will be used based on information from the MES and/or Recipe Management System combined with the location and status of each durable.

EST_MACHINE_RECIPE

VARCHAR2(100)

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

EVENT

VARCHAR2(48)

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

EVENT_COMMENT

VARCHAR2(512)

Comment associated with the event. (* from FPSINPUT.WIP_HOLD_FUTURE)

EVENT_INST1

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_INST2

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_INST3

DATE

User-defined field which can store any instant relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_INST_IF_IN_PAST

DATE

EVENT_NUM1

NUMBER(10)

User-defined field which can store any number relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_NUM2

NUMBER(10)

User-defined field which can store any number relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_NUM3

NUMBER(10)

User-defined field which can store any number relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM1

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM2

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM3

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM4

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_PARM5

VARCHAR2(128)

User-defined parameter which can store any value relevant to the event. Description of use should be noted in WIP_EVENTS table. (* from FPSINPUT.WIP_EVENT_HIST)

EVENT_TYPE

VARCHAR2(12)

FPS event_type assigned to this event. Event_type values are set by FPS and listed in WIP_EVENT_TYPES.

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

FACILITY_ENT_INST

DATE

N

FACILITY_SEGMENT

VARCHAR2(36)

Facility segment is the parent of common step and is used as the highest level grouping when we show WIP for a route group or the entire facility where we cannot use route segment. We would prefer somewhere between 8 and 20 facility segments. Typically we will have to define these (as opposed to route_segment which we will typically come from the MES). There is no RTG_FACILITY_SEGMENTS table because sorting of facility segments is determined by common_step_sort. A trigger on RTG_COMMON_STEPS ensures that facility segments are contiguous when the entire facility is sorted by common step. (* from FPSINPUT.RTG_COMMON_STEPS)

FACILITY_SEGMENT_ENT_INST

DATE

FAC_SHUTD_PCT

NUMBER(3)

FAC_SHUTD_PCT_CHG_INST

DATE

FIRST_LOT_IN_JOB

VARCHAR2(32)

The first lot in the job determined by the order of events. When this first lot logs the first tool event which is usually a reserve or dispatch then the job_id is created with only this lot. Then subsequent lots join this job. While we use job_id to identify lots that will process or are processing or processed together, first_lot_in_job is still a useful field.

FIRST_UNIT_SEC

NUMBER(9,3)

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

FIRST_WFR_BEG_INST

DATE

Time when the first wafer of the job started processing. (* from FPSBASE.WIP_STEP_HIST)

FIRST_WFR_END_INST

DATE

Time when the first wafer of the job finished processing. (* from FPSBASE.WIP_STEP_HIST)

HOLD_FOR

VARCHAR2(48)

The user responsible for the hold lot. Note this is different than the user who put the lot on hold. This is the person who needs to address the hold and potentially release it. (* from FPSINPUT.WIP_EVENT_HIST)

HOLD_GROUP

VARCHAR2(36)

Grouping of hold_type for reporting purposes. (* from FPSINPUT.WIP_HOLD_GROUPS)

HOLD_NOTE

VARCHAR2(512)

Comment or note entered when the lot went on hold. Normally this should match the comment which was entered in the hold event. The logic to determine the hold note can get tricky when a subsequent comment event is logged to a lot already on hold because we do not know whether to update the hold note with the new comment or keep the comment from the original event that put the lot on hold. Our solution is to not update the hold_note by trigger with this comment event and leave the decision to our logic in WIP_LOTS_VERIFY. If you want to use the subsequent comment then populate it as the hold_note in WLV otherwise keep the original comment in WLV. Then our logic in CHK_WIP_LOTS_REALTIME is that if the hold_note written in WIP_LOTS_VERIFY differs from the hold_note populated by trigger while the hold_type and hold_for agree then we waive the normal 20 minute waiting period and update the hold_note immediately with a MISS-HOLDNOTE event. (* from FPSINPUT.WIP_LOTS_VERIFY)

HOLD_SEC_COMP_FOR_WSF

NUMBER(7)

HOLD_SEC_FOR_WSF_TO_EOL

NUMBER(11)

HOLD_TYPE

VARCHAR2(24)

Generally hold_type will come directly from the MES. (* from FPSINPUT.WIP_HOLD_TYPES)

IF_WAIT_UPDATED_INST

DATE

INC_BATCH_PCT

NUMBER(3)

Percentage of the full batch size processed. For tool performance calculations, TOOL_PCT percentage productivity is calculated using INC_BATCH_PCT to factor in that the batch size is not fully utilized.

INSERTED_TIME

TIMESTAMP(6)

Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* from FPSINPUT.WIP_EVENT_HIST)

INSERTED_TIME_WEH

TIMESTAMP(6)

N

INTERVAL_SEC

NUMBER(9,3)

Unit_int_sec or batch_int_sec expected for the lot at the time of processing from our THP tables.

IS_ALREADY_COMP_THIS_OPER

CHAR(1)

IS_CURR_RECORD

CHAR(1)

IS_DELETE_EVENT

CHAR(1)

If the event results in this lot being deleted then logic in the trigger will set this to Y. This flag indicates that we should delete this lot from WIP_EVENTS_CURR_STEP and WIP_STEP_FUTURE in via subsequent triggers. There are two correct ways to delete a lot. One is to log an event with the qty set to 0 (i.e. merge or scrap or terminate). Two is to log an event where next_facility is set to a facility which is not in GEN_FACILITIES (i.e. ship). Then there is case three where the lot disappears from WIP_LOTS_VERIFY with no event designating this. Case three means the ETL needs to be improved to log the proper event so it becomes case one or two.

IS_DURABLE_ASSIGNED

CHAR(1)

IS_ECT_STATE_CHG

CHAR(1)

N

IS_EVENT_AUTO

CHAR(1)

IS_EXPT_STEP

CHAR(1)

N

Flag set to Y if the experiment requires abnormal processing at this step.

IS_FAC_SHUTD_PCT_CHG

CHAR(1)

N

IS_HOLD

CHAR(1)

N

This field indicates the lot is on hold after the event is logged. In other words, this will always be Y if is_hold_start is Y and always N if is_hold_end is Y. (* from FPSINPUT.WIP_EVENT_HIST)

IS_HOLD_END

CHAR(1)

N

Event ended hold (* from FPSINPUT.WIP_EVENT_HIST)

IS_HOLD_START

CHAR(1)

N

Event started hold (* from FPSINPUT.WIP_EVENT_HIST)

IS_INACTIVE_STEP

CHAR(1)

N

Since we now use RTG_ROUTE_STEPS_INACTIVE table, we should only include the active steps on each route in RTG_ROUTE_STEPS. Therefore this value must be set to N in the RTG_ROUTE_STEPS table but will be set appropriately to Y for inactive steps in the RTG_ROUTE_STEPS_PLUS table. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_IN_WSH

CHAR(1)

IS_LAST_RECORD_FOR_STEP

CHAR(1)

IS_MHS_STATE_CHG

CHAR(1)

N

IS_NEXT

CHAR(1)

N

Indicates record goes into WIP_STEP_HIST

IS_NONSTD

CHAR(1)

N

Our column to indicate non-standard processing at the step. For example, an experiment or a chain that is only active at a particular step or set of steps and then goes back to being normal for the route. If an experiment is severe enough that it affects the final product and has to be planned separately then it will be its own prd or planprd.

IS_REAL_TOOL

CHAR(1)

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* from FPSINPUT.EQP_TYPES)

IS_REWORK

CHAR(1)

N

Y indicates the lot is on a rework route after the event is logged. If a lot is reworked then returns to the main route and repeats some steps, is_rework will be N but we will count those steps as repeats. (* from FPSINPUT.WIP_EVENT_HIST)

IS_REWORK_END

CHAR(1)

N

Event ended rework (* from FPSINPUT.WIP_EVENT_HIST)

IS_REWORK_START

CHAR(1)

N

Event started rework (* from FPSINPUT.WIP_EVENT_HIST)

IS_SCRAP_EVENT

CHAR(1)

If the event results in any number of units in the lot to be scrapped then this field is set to Y. It is common to have scrap occur not only from a scrap event but also from a move event where the lot loses some but not all units. Therefore we cannot just look at scrap events and this flag tells what to count as scrap for this particular facility. (* from FPSINPUT.WIP_EVENT_HIST)

IS_SHIP_EVENT

CHAR(1)

This flag tells us what to count as a ship for a particular facility. Related to the ship event is the finish event which is the last event for a facility-prd which either changes facility or changes prd or terminates the lot by changing the qty to 0 without merging. Often the ship event is the same event as the finish event. But when the ship event is different and logged prior to the finish event, we write a record to CTM_FINISHED_LOT_HIST when the ship event is logged with finish_inst blank. This record is include in Dashboard Ships Summary but not in Finished Lot Cycle Time. Then later when the lot finishes, we update the record keeping the ship_inst and populating the finish_inst so it is then including in Finished Lot Cycle Time. Technically this "insert at ship then update at finish" process is the same regardless of how far the ship is before the finish but it is most critical when the the ship is quite some time before the finish, for example, when wafer test is part of the same route but we want to count the ship when the lot finishes the fab steps. (* from FPSINPUT.WIP_EVENT_HIST)

IS_STAGING_STEP

CHAR(1)

N

We expect large amounts of WIP and long cycle times at staging steps. We still calculate cycle time like any other step but the important difference is that lots currently at a staging step are not counted as normal coming lots to future steps. Instead we show them in a special column labeled From Staging. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_STEP_ENT_FROM_MISS

CHAR(1)

JOB_DEBUG_INFO

VARCHAR2(128)

Debug information written by trigger regarding the population of the job-related fields for each event.

JOB_ID

VARCHAR2(64)

Automatically set by trigger when the first lot of a job logs an event to the tool.

LAST_EVENT

VARCHAR2(48)

LAST_EVENT_INST

DATE

LAST_EVENT_TYPE

VARCHAR2(12)

LAST_HOLD_INST

DATE

Time when the lot was last placed on hold. (* from FPSBASE.WIP_FLUSH)

LAST_PROCESS_TOOL

VARCHAR2(16)

For rework and scrap events we automatically look up the last process tool for the lot. Process tool is determined by the process class of the tool and excludes metrology and support tools. It is likely this was the cause of the rework or scrap although by no means certain.

LAST_PROCESS_TOOL_BEG_INST

DATE

Time when the lot finished processing on the previous tool (excluding metrology).

LAST_RELEASE_INST

DATE

Time the lot was previously released from hold. (* from FPSBASE.WIP_STEP_HIST)

LAST_STEP_CURR_PRTY

VARCHAR2(256)

The last step where the current lot_priority applies. After this step we assume the lot will return to its plan_priority. (* from FPSINPUT.WIP_LOTS_STATIC)

LAST_TOOL

VARCHAR2(16)

For rework and scrap events we automatically look up the last tool where the lot processed including metrology tools.

LAST_TOOL_BEG_INST

DATE

Time of the last event on the previous tool (including metrology) for the lot occurred.

LAST_WFR_BEG_INST

DATE

Time when the last wafer of the job started processing. (* from FPSBASE.WIP_STEP_HIST)

LAST_WFR_END_INST

DATE

Time when the last wafer of the job finished processing. (* from FPSBASE.WIP_STEP_HIST)

LOGGED_ENTITY

VARCHAR2(36)

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* from FPSINPUT.EQP_EVENT_HIST)

LOGICAL_RECIPE

VARCHAR2(100)

Used for infomational purpose and is populated if known otherwise it will match the recipe. (* from FPSINPUT.WIP_EVENT_HIST)

LOGS_AUTO_BEGIN

CHAR(1)

For tools that log auto begin events we want the manual begin (i.e. the MES lot start or batch start or track in) to count as a DISPATCH event. But for tools which do not log auto begin events, we want the manual begin to count as a BEGIN_M event. We automatically calculate logs_auto_begin for each tool and then we set events which are configured as BEGIN_M in WIP_EVENTS to DISPATCH where logs_auto_begin is Y. (* from FPSBASE.EQP_TOOLS_PLUS)

LOTS_IN_JOB

NUMBER(2)

Set to the number of lots in the job. The value in WIP_EVENT_HIST represents the number of lots which have started processing in this job *so far*, while the value in WIP_STEP_HIST (written after the job completes processing) represents the total number of lots in the job.

LOT_TYPE

VARCHAR2(24)

N

Lot_type is the base of the hierarchy that determines lot_family then lot_group. Ideally lot_type will come straight from the MES with little modification. (* from FPSINPUT.WIP_LOT_TYPES)

MADE_CASCADE

CHAR(1)

MAIN_ROUTE

VARCHAR2(256)

Primary route used by the prd. Excludes rework and alternate routing. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* from FPSINPUT.WIP_EVENT_HIST)

MAIN_RT_OPER_ENT_INST

DATE

MAIN_RT_STEP

VARCHAR2(256)

When lot is on a rework or alternate route, this is the step where it will return to the main route. We use this for planning purposes so we can calculate remaining steps. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route step is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* from FPSINPUT.WIP_EVENT_HIST)

MAX_BATCH_SIZE_CARRIERS

NUMBER(2)

Maximum number of carriers which can be loaded together in a batch. This column must be populated and is used for ETP and for scheduling to determines whether the tool loads in batches. Non-batch tools will have a value of 1 and batch tools limited by units will be populated according to the comment in max_batch_size_units. This is not used for throughput calculation because we can have tools which load multiple carriers at once but whose throughput is calculated per unit. (* from FPSINPUT.EQP_TYPES)

MEAS_RESULT

VARCHAR2(1)

Result of measurement. For facilities not using FPS Sampling this value is for display purposes only and can be pass/fail or a number or anything. For facilities using FPS Sampling this field is used to dynamically adjust the sampling rules and must be a letter grade A-F. (* from FPSINPUT.WIP_EVENT_HIST)

MERGE_INTO_PRD

VARCHAR2(64)

This is the prd of the lot into which this lot is merged if that prd is different than the prd of this lot. Typically this is an assembly step. This is important to track the prd flow from individual components into the final shipped prd. (* from FPSINPUT.WIP_EVENT_HIST)

MERGE_LOT_LIST

VARCHAR2(512)

Lot (or list of lots) merged with this lot by this merge event. A value here indicates this was a merge event. (* from FPSINPUT.WIP_EVENT_HIST)

MHS_STATE

VARCHAR2(29)

MHS_STATE_CHG_INST

DATE

MHS_STATE_CHG_STATION

VARCHAR2(32)

MPU

NUMBER(8,4)

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer.

NEXT_BANK

VARCHAR2(36)

Event moved the lot to this new bank (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_FACILITY

VARCHAR2(6)

Event moved the lot to this new facility (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_FACILITY_SEGMENT

VARCHAR2(36)

NEXT_INST

DATE

The value of next_inst and ect_to_inst are null for the current record for each lot. This null value means "a yet unknown time in the future." Most "greater than" filters should include the current record. To support these common filters, we created corresponding next_inst_not_null and ect_to_inst_not_null columns. In these columns, the current record has a value of 1 January 2099. Therefore a simple "greater than" filter will always include the current record, at least for the next eight decades. The xxx_not_null columns each have an index so these queries will be fast.

NEXT_INST_NOT_NULL

DATE

See column comments for NEXT_INST.

NEXT_MAIN_ROUTE

VARCHAR2(256)

Event moved the lot to this new main route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_MAIN_RT_STEP

VARCHAR2(256)

Event moved the lot to this new step on the main route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_OPERATION

VARCHAR2(50)

Operation of the next_step used primarily to determine is_oper_move. Populated by trigger.

NEXT_PLANPRD

VARCHAR2(64)

If this event results in the planprd of the lot changing the new value is stored here. (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_PRD

VARCHAR2(64)

Event moved the lot to this new prd (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_PROCESS

VARCHAR2(50)

Process of the next step. Populated by trigger.

NEXT_ROUTE

VARCHAR2(256)

Event moved the lot to this new route (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_ROUTE_SEGMENT

VARCHAR2(36)

NEXT_STEP

VARCHAR2(256)

Event moved the lot to this new step (* from FPSINPUT.WIP_EVENT_HIST)

NEXT_WSF_STEP

VARCHAR2(256)

NO_HIST_UPDATED_BY

VARCHAR2(64)

NO_HIST_UPDATED_TIMESTAMP

TIMESTAMP(6)

NUM_DISCS_FOR_JOB

NUMBER(2)

Number of discs used in the job as estimated by our throughput logic.

NUM_WFRS_BEG

NUMBER(3)

NUM_WFRS_ENDED

NUMBER(3)

OPERATION

VARCHAR2(50)

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

OPERATOR

VARCHAR2(64)

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* from FPSINPUT.WIP_EVENT_HIST)

OPER_ENT_INST

DATE

N

OTHER_FACILITY_W_ACTION

VARCHAR2(32)

This field is populated by the trigger when an event is logged for a lot that is duplicated because it is at a step where it will run on a tool in another facility. This value is used by the OTHER_FACILITY_EACH_LOOP procedure if it exists.

OVR_JOB_ID

VARCHAR2(64)

Allows us to specify the job_id in the ETL if the MES already provides this. In the normal case when this value is not populated, the standard logic to define job_id based on events is used. (* from FPSINPUT.WIP_EVENT_HIST)

OVR_SAME_JOB_IF_WITHIN_SEC

NUMBER(3)

Our default behavior is to consider a subsequent begin event to a batch tool in the same batch if within 20 seconds. For a non-batch tool the default is to only consider in the same job if in the same second. This flag can be used to adjust this if necessary. (* from FPSINPUT.EQP_TYPES)

PAUSE_INST

DATE

When a lot has begun processing on a tool and an event with event_type of PAUSE is logged, pause_inst captures the time of the pause. If multiple pauses happen to the same lot, the last pause_inst is used. See description of PAUSE ect_state for more details. (* from FPSBASE.WIP_STEP_HIST)

PERM_RANK

VARCHAR2(1)

Permanent rank is typically loaded by ETL from a combination of the MES, recipe management system, and existing preference logic already used at the site. Possible values are in FPSADMIN.RTG_PERM_RANKS. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

PLANPRD

VARCHAR2(64)

N

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PLANPRDS)

PLAN_PRIORITY

VARCHAR2(7)

N

Permanent priority of the lot set in the MES generally by planning. (* from FPSINPUT.WIP_EVENT_HIST)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PREV_END_PROC_INST

DATE

End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations.

PREV_PROCESS

VARCHAR2(50)

Process of the previous job on the tool before the job including this lot. Used in combination with prev_recipe to determine if this job cascaded and if it required a setup change.

PREV_RECIPE

VARCHAR2(100)

Recipe of the previous job on the tool before the job including this lot. Used in combination with prev_process to determine if this job cascaded and if it required a setup change.

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROC_PORT

VARCHAR2(5)

PROC_PORT_MODE

VARCHAR2(24)

PROC_SEC_BEFORE_PAUSE

NUMBER(7)

PROC_STATE_EVENT_ONLY

VARCHAR2(5)

N

The proc_state_event_only column is the process state derived exclusively from lot and wafer events. This is the parent of process_state and it is equal to process_state when the value is ENDED, PROC, PAUSE, ABORT, DISP, and STUCK because these process states come only from events. When the value is HOLD then we look at the hold groups to determine if the process state is HOLD or LONGH. And when the value is WAIT then we look at the complex ect_state_if_wait column to determine if the process state is STG, INHIB, BLOCK, DOWN, WAIT1, WAIT2, or WAIT3. The link between process_state and proc_state_event_only in the ECT diagram is not used in the logic in WIP_LOTS_REALTIME or GET_PROC_STATE_EVENT_ONLY but the values should always match. (* from FPSBASE.WIP_LOTS_REALTIME)

PROC_STATE_EV_ONLY_CHG_INST

DATE

N

QTY

NUMBER(7)

N

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* from FPSINPUT.WIP_EVENT_HIST)

QTY_DELTA

NUMBER(7)

N

Difference in number of wafers due to an event that changes lot quantity (* from FPSINPUT.WIP_EVENT_HIST)

QTY_IN_JOB

NUMBER(7)

The number of units in the job. For example a batch tool with 5 carriers each with a 25 wafer lot would have 125 in the job. This is also important for non-batch tools where we have multiple lots in a carrier as the job might include all lots or only selected lots.

QTY_MEAS

NUMBER(7)

Quantity of units measured at this metrology step. This is less than or equal to the qty_in_job. The standard case is where we have a 25 wafer lot so the qty_in_job is 25 but we only measure 3 wafers on the metrology tool so qty_meas is 3. (* from FPSINPUT.WIP_EVENT_HIST)

RCP_MAX_BATCH_SIZE_LOTS

NUMBER(2)

RCP_MAX_BATCH_SIZE_UNITS

NUMBER(7)

READY_INST

DATE

Time when the lot was ready to be processed (e.g. after recipe downloaded). (* from FPSBASE.WIP_STEP_HIST)

RECIPE_VERSION

VARCHAR2(12)

This field is for historical tracking purposes only and is not used in any FPS calculation. (* from FPSINPUT.WIP_EVENT_HIST)

RESERVE_INST

DATE

Time when the lot was reserved to the tool either by Scheduler or external or manual reservation. As opposed to dispatch, reserve is only in the FPS DWH and therefore can be automatically undone. (* from FPSBASE.WIP_STEP_HIST)

RESERVE_SOURCE

VARCHAR2(5)

RESERVE_TOOL

VARCHAR2(16)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

ROUTE_OF_NEXT_WSF_STEP

VARCHAR2(256)

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

ROUTE_SEGMENT_ENT_INST

DATE

N

RQD_SETUP

VARCHAR2(100)

Rqd_setup is determined by ovr_rqd_setup in RTG_TOOL_ASSIGNMENTS and use_process_as_rqd_setup and use_est_mach_rcp_as_rqd_setup from EQP_TYPES. The latter two columns allow us to easily specify for an eqp_type that setup times should be calculated by process or est_machine_recipe. For traditional setups that are a group of recipes we use ovr_rqd_setup.

RT_STEP_BANK_ENT_INST

DATE

N

If the lot is at a step then this is the time when it entered the current route-step. If the lot is at a bank then this is the time it entered the current bank. (* from FPSBASE.WIP_LOTS_REALTIME)

SCHED_GROUP_BEST_TOOL_IF_OTHER

VARCHAR2(36)

SCRAP_CATEGORY

VARCHAR2(64)

A optional categorization field for scrap events which can be defined for the facility. (* from FPSINPUT.WIP_EVENT_HIST)

SCRAP_MODULE

VARCHAR2(12)

Responsible module for the scrap event. (* from FPSINPUT.WIP_EVENT_HIST)

SCRAP_OWNER

VARCHAR2(48)

Engineer responsible for analyzing and recording this scrap event. (* from FPSINPUT.WIP_EVENT_HIST)

SEC_BEG_PROC_INST

DATE

Time when processing on secondary tool started. (* from FPSBASE.WIP_STEP_HIST)

SEC_END_PROC_INST

DATE

Time when processing on secondary tool finished. (* from FPSBASE.WIP_STEP_HIST)

SEC_QTY

NUMBER(7)

N

Quantity of units in the lot according the sec_qty_unit defined for the facility. See the column comment for the qty column for details and examples. (* from FPSINPUT.WIP_EVENT_HIST)

SEC_QTY_DELTA

NUMBER(7)

N

Difference in number of die due to an event that changes lot quantity (* from FPSINPUT.WIP_EVENT_HIST)

SEC_QTY_DELTA_DURING_STEP

NUMBER(7)

SEC_TOOL

VARCHAR2(19)

SPLIT_FROM_LOT

VARCHAR2(32)

SPLIT_FROM_LOT2

VARCHAR2(32)

SPLIT_LOT_LIST

VARCHAR2(512)

Lot (or list of lots) split along with this lot by this merge event. A value here indicates this was a split event. (* from FPSINPUT.WIP_EVENT_HIST)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_ENT_INST

DATE

N

Time when the lot entered the step.

STEP_HOLD_SEC_DAY_LAST_RLS

NUMBER(5)

STEP_HOLD_SEC_RELEASED

NUMBER(9)

STEP_HOLD_SEC_SHIFT_LAST_RLS

NUMBER(5)

STEP_NUM_HOLDS

NUMBER(2)

TCT_SEC

NUMBER(7)

Theoretical cycle time in seconds

THP_IGNORE_REASON_WEH

VARCHAR2(12)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

UPDATED_BY

VARCHAR2(64)

UPDATED_TIMESTAMP

TIMESTAMP(6)

WAIT_SEC_COMP_FOR_WSF

NUMBER(7)

WAIT_SEC_TO_SCHED_QUEUE

NUMBER(7)

WAIT_TO_SCHED_REASON_QUEUE

VARCHAR2(256)