FPSADMIN.DASH_P_CV_AVAIL_ENTITY

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

ENTITY

VARCHAR2(19)

N

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

CV_OF_AV

NUMBER(*,4)

This is the coefficient of variation of availability for the tool over the period of time defined by num_days_for_cv_of_av in gen_site. (* from FPSAPP.DASH_P_CV_AVAIL)

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

MEAN_AVAIL

NUMBER(5,4)

This is the mean availability for the tool over the period of time defined by num_days_for_cv_of_av in gen_site. (* from FPSAPP.DASH_P_CV_AVAIL)

MNT_FAMILY

VARCHAR2(50)

N

MNT_FAMILY is assigned to each EQP_TYPE. Tools in the same MNT_FAMILY are similar and share the same maintenance schedule. (* from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE

VARCHAR2(12)

N

MNT_MODULE is the module responsible for maintaining the tool and is a property of MNT_FAMILY. See comments on the module column in GEN_MODULES for how it relates to eqp_module and mnt_module. (* from FPSINPUT.EQP_MNT_FAMILIES)

MNT_MODULE_DISPLAY

VARCHAR2(20)

N

SIGMA_AVAIL

NUMBER(5

This is the standard deviation of availability for the tool over the period of time defined by num_days_for_cv_of_av in gen_site. (* from FPSAPP.DASH_P_CV_AVAIL)