FPSADMIN.WIP_STEP_HIST_MANUAL

INST

DATE

N

Time when the event occurred. (* from FPSINPUT.WIP_EVENT_HIST)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

ACTUAL_CH_USED

VARCHAR2(24)

N

Here is where we can log the actual_ch_used directly if we know it. We have three ways to determine actual_ch_used in WIP_LOTS_REALTIME which populates WIP_STEP_HIST: 1) Log it directly in this colum for an event where the logged_entity is the main tool. 2) Log events to each of the chambers used in WIP_EVENT_HIST. 3) Log events to each of the chambers used in WIP_WAFER_HIST. (* from FPSINPUT.WIP_EVENT_HIST)

EST_MACHINE_RECIPE

VARCHAR2(100)

N

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

BEG_PROC_INST

DATE

N

time when the lot started processing on the main tool.

ACTUAL_MACHINE_RECIPE

VARCHAR2(100)

Machine recipe used to process the lot as logged during processing by the tool. (* from FPSINPUT.WIP_EVENT_HIST)

END_PROC_INST

DATE

N

time when the lot finished processing on the main tool.

EVENT

VARCHAR2(48)

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

EVENT_COMMENT

VARCHAR2(512)

Comment associated with the event. (* from FPSINPUT.WIP_HOLD_FUTURE)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

IS_SCHED

CHAR(1)

This flag indicates that lots in this group should be scheduled. This flag additionally causes TW groups to be included in WIP_STEP_FUTURE which they are normally not. (* from FPSINPUT.WIP_LOT_GROUPS)

JOB_ID

VARCHAR2(64)

N

Automatically set by trigger when the first lot of a job logs an event to the tool. (* from FPSBASE.WIP_LOT_HIST)

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

OPERATOR

VARCHAR2(64)

N

In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* from FPSINPUT.WIP_EVENT_HIST)

QTY

NUMBER(6)

N

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* from FPSINPUT.WIP_EVENT_HIST)