FPSAPP.EQP_LOGGED_ENTITIES

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

LOGGED_ENTITY

VARCHAR2(36)

N

Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* from FPSINPUT.EQP_EVENT_HIST)

CAP_ENTITY

VARCHAR2(19)

CH

VARCHAR2(1)

A single character to identify the chamber which must be unique with the tool. We concatenate the CH to get the string for CH_USED so it is helpful for diagnostic purposes if this single character is representative of the chamber (i.e. A for ET12CHA or 1 for MD27C1) because then the CH_USED string makes sense. However it is not required and if the chamber naming is inconsistent we might get use 1, 2, 3, etc. for the CH. (* from FPSINPUT.EQP_CHAMBERS)

CHAMBER

VARCHAR2(19)

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* from FPSINPUT.EQP_CHAMBERS)

CH_SHORT_DISPLAY

VARCHAR2(4)

Short display for the chamber displayed on Dashboard and reports as part of a list of chambers used. This should not include the tool name but only the chamber on the tool so if the chambers on ET11 are ET11CHA and ET11CHB1 and ET11CHB2 then this field should be A, B1, and B2. (* from FPSINPUT.EQP_CHAMBERS)

CH_TYPE

VARCHAR2(6)

This column is critical for sequential chamber tools where a wafer goes through multiple chambers. It identifies the type of chamber so two chambers with the same ch_type are identical and wafers can use either one. See comment on mfg_pct_per_ch column for an example. For independent chamber tools where all chambers are the same and each wafer goes to only one chamber then ch_type should be set to the default value CH so that ch_type_cnt is 1CH, 2CH, 3CH, etc. (* from FPSINPUT.EQP_CHAMBERS)

IS_ASSIST_CHAMBER

CHAR(1)

This indicates that the chamber assists the other primary chambers. If an assist chamber is in ch_allowed then at one least chamber of the ch_type must be up but as long as this is true then we ignore the assist chambers. We send only the non-assist chambers to the schedule as ch_to_sched. (* from FPSINPUT.EQP_CHAMBERS)

IS_SEC_FOR_BEG_END

CHAR(1)

Set to Y to store begin and end events logged to this entity in the SEC_BEGIN_INST and SEC_END_INST columns in WIP_STEP_HIST. The common example is for steppers where the begin and end for the lot will be from the track but we also want to store the begin and end for the stepper. (* from FPSINPUT.EQP_CHAMBERS)

IS_WIP_ENTITY

CHAR(1)

LOG_TYPE

VARCHAR2(36)

MFG_PCT_PER_CH

NUMBER(7,4)

This optional value is the mfg_pct of the tool when this chamber is the only chamber of its ch_type that is MFG (PRD or SBY) while all chambers of all other ch_types are MFG. This column applies to sequential chamber tools which have chambers of more than one ch_type and have multiple chambers with the same ch_type. The default if this column is not set is to assume that all ch_types are bottlenecks of the tool so if 3 of 4 chambers of one type are MFG then the mfg_pct for that type is 75. If 2 of 3 then 66.7% and so on. But typically one ch_type is the bottleneck which means that if a chamber of another type is NONMFG (ENG or UDT or SDT) then the mfg_pct of tool is better than the ratio. Let us say a tool has two clean chambers C1+C2 and three deposition chambers C3+C4+C5. C1+C2 have ch_type CLEAN while C3+C4+C5 are all DEP. If both C1+C2 are NONMFG then the mfg_pct of the tool is 0% regardless of the status of the DEP chambers because it has no CLEAN chamber. Similarly if all three of C3+C4+C5 are NONMFG then it is also 0%. Of course if all chambers are MFG then it is 100%. But if at least one chamber is MFG while at least one of the CLEAN chambers and at least one of the DEP chambers is MFG then the tool can still run albeit with a degraded throughput. By default if only one of C1+C2 is MFG then the mfg_pct of the ch_type CLEAN is 50%. Similarly if one of C3+C4+C5 is MFG then the mfg_pct of DEP is 33.3% and if two then 66.7%. Technically the default calculation is 100/n where n is the number of chambers of the ch_type. But if the CLEAN chambers are the bottleneck and only one DEP chamber is NONMFG then the throughput will exceed the default of 67% and this mfg_pct_per_ch value is an estimate of this. If the mfg_pct_per_ch for DEP is 40 that means the throughput will be 40% with one DEP chamber up and 80% with two DEP chambers up. So the mfg_pct of the ch_type is p * number of MFG chambers (but no more than 100 of course) and the mfg_pct of the tool is the minimum of the mfg_pct of each ch_type. One final note is that mfg_pct_per_ch is an approximation of the contribution of each chamber for all recipes but in reality each recipe can be different. If we know the throughput for the chamber combination for the recipe then we use that instead of the mfg_pct_per_ch. For example, if C4 is NONMFG, mfg_pct_per_ch tells us the tool mfg_pct is 80% and we use that 80% number if the tool is standby or if we do not know the throughput on C1+C2+C3+C5 for the recipe running. But if we know that recipe runs at 30 UPH with all five chambers but 27 UPH with C1+C2+C3+C5 then we set the tool mfg_pct to 90%. (* from FPSINPUT.EQP_CHAMBERS)

SUBTOOL

VARCHAR2(16)

A subtool is an entity in the MES to which events can be logged that is between TOOL and CHAMBER. Subtool is rarely used. One example is when a chamber is part of a side which is part of a main tool and it is possible to log the side down which means you cannot use any chambers on that side. The side would be a subtool. (* from FPSINPUT.EQP_CHAMBERS)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

TOOL_MFG_PCT_ALL_TYPE_NONMFG

NUMBER(7,4)

This column indicates tool mfg_pct if all chambers of the ch_type are NONMFG. It works in combination with ch_type, mfg_pct_per_ch, and subtool to allow us to calculate tool_pct for what we currently believe are all cases of chamber combinations. The common example here is a Litho cell which can still run in track-only mode if stepper is NONMFG but cannot run anything if track is NONMFG. Our default is to take the minimum mfg_pct of each type which would result is 0% for the tool if stepper was NONMFG. This column overrides that so if we set it to 60 for the stepper then we would consider the tool 60% even though only the track was MFG. Technically we would assign a tool_pct of 60 to the MFG track and then the remaining 40% to the NONMFG stepper. Another use for this column is when we have an extra chamber of a different ch_type that has limited use, perhaps just for R+D. Here we would set tool_mfg_pct_all_type_nonmfg to 100% and essentially ignore the chamber when it is NONMFG. In this special case, we can also set mfg_pct_per_ch to 0 to completely ignore it in any state. (* from FPSINPUT.EQP_CHAMBERS)