Data Dictionary
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FPSINPUT Views
> FPSINPUT.WIP_WAFER_HIST_LOOP
View FPSBASE.EQP_REF_CH_PATH_STATUS
This refreshed table is a replacement for the GET_CH_PATH_STATUS function which was too slow. It is used in WIP_STEP_FUT_ASSIGNMENTS where it is critical for speed of the WIP_CURR_LOTS_TOOLS table refresh. IMPORTANT: This table does not check the status of the main tool because we already do that in WIP_STEP_FUT_ASSIGNMENTS so this simplifies and speeds this function. This query is similar to GET_CH_ALLOWED_STATUS but it only accepts the path if all chambers in the path are MFG. This is slightly different than the other query which accepts the path if at least one chamber of each ch_type is MFG. For the paths, we assume that all allowed paths will be specified. Let's take a tool that has A+B of ch_type ET and it has C+D of ch_type DEP. If we used ch_allowed then it would just be ABCD which we interpret as one of each ch_type. At sites when we use path then we would specify each allowable path so we would list ABCD, ABC, ABD, ACD, BCD, AC, AD, BC, and BD. This query is much simpler than the other query because it just checks that all chambers are MFG and will return a value if not.
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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CH_PATH |
A path of chambers which can be used to process the lot on this tool. This is a concatenation of the single character CH from EQP_CHAMBERS similar to CH_ALLOWED. It is desired to list the chambers in order if there is an order however currently the order is not necessary and not used by Scheduler. (* inherited from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH) |
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CH_PATH_SORT_FOR_EST_CH_USED |
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CH_PATH_NONMFG_E10_STATES |
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CH_PATH_NONMFG_MSG |
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CH_PATH_PRD_MSG |
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CH_PATH_PENDING_MSG |
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EST_SECONDS_UNTIL_UP |