FPSBASE.RTG_PROCESS_COUNTER_ASGNS

SCHED_GROUP

VARCHAR2(36)

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* from FPSINPUT.RTG_PROCESS_GROUPS)

COUNTER_INFO

VARCHAR2(512)

the unique identifier for the counter associated with this assignment

ASGN_INFO

VARCHAR2(512)

the unique identifier for the assignment to the counter info

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

CH

VARCHAR2(1)

A single character to identify the chamber which must be unique with the tool. We concatenate the CH to get the string for CH_USED so it is helpful for diagnostic purposes if this single character is representative of the chamber (i.e. A for ET12CHA or 1 for MD27C1) because then the CH_USED string makes sense. However it is not required and if the chamber naming is inconsistent we might get use 1, 2, 3, etc. for the CH. (* from FPSINPUT.EQP_CHAMBERS)

DURABLE

VARCHAR2(64)

Durables are either reticles for Litho or probe cards for Wet or Sort. A durable can either be in a carrier or at a location without a carrier. (* from FPSINPUT.RTG_DURABLES)

PRD

VARCHAR2(64)

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

RECIPE

VARCHAR2(100)

the recipe; the est_machine_recipe (* from FPSINPUT.EQP_RECIPES)

RECIPE_FAMILY

VARCHAR2(100)

the recipe family for this eqp type; each family can have be assigned to multiple groups (* from FPSINPUT.EQP_RECIPE_FAMILIES)

RECIPE_GROUP

VARCHAR2(100)

the recipe group for this eqp type; each group can have multiple families (* from FPSINPUT.EQP_RECIPE_FAMILIES)

ROUTE

VARCHAR2(256)

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

ROUTE_FAMILY

VARCHAR2(36)

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

VARCHAR2(36)

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* from FPSINPUT.RTG_ROUTE_GROUPS)

SETUP

VARCHAR2(100)

the unique identifier for the setup associated with this assignment

STEP

VARCHAR2(256)

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)