FPSBASE.EQP_CH_PATH_STATUS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

CH_PATH

VARCHAR2(24)

N

A path of chambers which can be used to process the lot on this tool. This is a concatenation of the single character CH from EQP_CHAMBERS similar to CH_ALLOWED. It is desired to list the chambers in order if there is an order however currently the order is not necessary and not used by Scheduler. (* from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH)

CH_PATH_NONMFG_E10_STATES

VARCHAR2(15)

CH_PATH_NONMFG_MSG

VARCHAR2(1000)

CH_PATH_PENDING_MSG

VARCHAR2(1000)

CH_PATH_PRD_MSG

VARCHAR2(1000)

CH_PATH_SORT_FOR_EST_CH_USED

NUMBER(4)