data-dictionary

FPSAPP.CHK_EQP_CHAMBERS

Data Dictionary

>

FPSAPP Views

> FPSAPP.WIP_WAFER_HIST_LOOP

View FPSBASE.CHK_EQP_CHAMBERS

This view checks the EQP_CHAMBERS table to ensure that there is at least one non-assist chamber for each tool and a whole bunch more required checks. Each one is described in the error message so we will not list all in the comments. This was originally a trigger on EQP_CHAMBERS update but it was tricky to fix with the trigger enabled so we made this a check instead.

Column

Comment

PROBLEM

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL_LIST