FPSINPUT.MSO_ACTIVE_TAGGED_WIP

LOT

VARCHAR2(32)

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

TO_MSO_PROCESS

VARCHAR2(100)

The tag condition is only applies at a FROM_MSO_PROCESS that is linked to the specified MSO_PROCESS in this column. If the value is NULL then it applies to all proceses. (* from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

SMP_RULE_ID

NUMBER(9)

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

PRD_MSO_GROUP

VARCHAR2(64)

Product group to be used for the Metrology Sampling Optimizer, generally based on similarity of technology or volume. (* from FPSINPUT.RTG_PRDS)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

ROUTE_MSO_GROUP

VARCHAR2(64)

Route group to be used for the Metrology Sampling Optimizer, generally based on similarity of technology or volume. (* from FPSINPUT.RTG_ROUTES)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

PLAN_PRIORITY

VARCHAR2(7)

N

Permanent priority of the lot set in the MES generally by planning. (* from FPSINPUT.WIP_EVENT_HIST)

LOT_GROUP

VARCHAR2(8)

N

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* from FPSINPUT.WIP_LOT_GROUPS)

LOT_MSO_GROUP

VARCHAR2(8)

N

Grouping of lot types to be used specifically for the MSO application for tag conditions and counter settings. (* from FPSINPUT.WIP_LOT_TYPES)

LOT_PARM_NAME

VARCHAR2(32)

Lots that have this MES parameter set with its corresponding value will be tagged or never tagged, depending on the condition type that is selected. If the value is NULL the check is ignored. (* from FPSBASE.MSO_TAG_CONDITION_CONTEXT)

TOOL_MSO_GROUP

VARCHAR2(64)

N

TOOL_MSO_GROUP is the grouping of tools used for Metrology Sampling Optimizer. This grouping is used in the Sampling Dashboard and for assigning event based sampling rules for a tool group. This group is similar to process family but allows a tool grouping specific to the MSO. (* from FPSINPUT.EQP_TOOL_MSO_GROUPS)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

CHAMBER

VARCHAR2(19)

N

Chambers belong to a main tool, have a state which is independent of the main tool and other chambers on the same tool, and can have events logged against it. The difference between a chamber and a port is that a chamber processes lots while port is just a location. (* from FPSINPUT.EQP_CHAMBERS)

CHAMBER_MSO_GROUP

VARCHAR2(64)

MSO_PROCESS

VARCHAR2(100)

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts (* from FPSINPUT.RTG_ROUTE_STEPS)

OPERATION

VARCHAR2(50)

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

FROM_MSO_PROCESS

VARCHAR2(100)

FROM_MSO_PROCESS_INST

DATE

FROM_MSO_TOOL

VARCHAR2(16)

FROM_PROCESS

VARCHAR2(50)

FROM_ROUTE

VARCHAR2(256)

FROM_STEP

VARCHAR2(256)

QTY

NUMBER(7)

Quantity of units in the lot according the qty_unit defined for the facility. It is required for all lots in each facility to have their qty defined in the same units therefore the change in the unit is critical to defining the facility. For example, a pretest facility might have a sort step in the middle where we learn the qty of die. Prior to this step we know only the wafer qty but after this step we know both wafer and die. Since wafer is the only qty we know throughput the flow then wafer must be defined as the qty unit for this facility. Die can then be populated as sec_qty when it is known. Similarly the wafer saw facility might have a step in the middle where we cut the wafers into die. After this step we no longer know the number of wafers which means that die must be the qty unit for this facility and wafers can be the sec_qty prior to the saw step. Please note that a lot with qty of 0 is allowed but only if the sec_qty is greater than 0. This is unusual but one case is where we know the wafers will be scrapped but cannot be scrapped quite yet. (* from FPSINPUT.WIP_EVENT_HIST)

TO_STEP

VARCHAR2(256)