data-dictionary

FPSBASE.EQP_TOOL_PLAN_DAY_HIST

Data Dictionary

>

FPSBASE Tables

> FPSBASE.EQP_TOOL_PLAN_DAY_HIST

Table FPSBASE.EQP_TOOL_PLAN_DAY_HIST"

Summary of ETP_HIST by tool for each plan day.

  • Schema: FPSBASE

  • Tablespace: FPSDATAHIST

  • Primary key: FACILITY, TOOL, EQP_STATE, START_PLAN_DAY

  • Foreign keys: EQP_TOOL_PLAN_DAY_H_FK_STSH: START_PLAN_DAY REFERENCES FPSINPUT.CAL_PLAN_DAYS (START_PLAN_DAY)


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

EQP_STATE

VARCHAR2(48)

N

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

START_PLAN_DAY

DATE

N

Plan days must be 24 hours in length and the start of the plan day must be the start of one of the shifts. Contrast this to plan day which is independent of shift. (* from FPSINPUT.CAL_PLAN_DAYS)

SECONDS

NUMBER(9