FPSADMIN.CM_P_ROUTE_STEP_EQP

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

BATCH_INT_SEC

NUMBER(6)

CAP_ENTITY_CNT

NUMBER(2)

CH_TYPE_OF_CAP_ENTITY

VARCHAR2(6)

EET_SEC

NUMBER(7)

N

End-to-end time in seconds (* from FPSBASE.WIP_LOT_HIST)

EFFECTIVE_PASSES

NUMBER

EFF_MPW

NUMBER

EST_MACHINE_RECIPE

VARCHAR2(100)

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

EST_REWORK_PCT

NUMBER(5,3)

N

Estimated percentage of lots completing this step which will go to rework. This is used for capacity modeling. (* from FPSINPUT.RTG_ROUTE_STEPS)

EST_SMP_PCT

NUMBER(5,2)

N

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

EST_USE_PCT

NUMBER(5,2)

N

Estimated use percentage is the percentage of units of this route-step that we expect to run on this eqp_type. Normally we use historical data to calculate this for the Capacity Model but entering a value in the OVR table manually overrides that historical number. (* from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

FIRST_UNIT_SEC

NUMBER(9,3)

N

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

IS_CAP_ENT_BY_CH

CHAR(1)

LINE_YIELD_PCT_TO_EOL

NUMBER(6,3)

N

Line yield percentage to end of line is the percentage of units expected to successfully complete the remaining steps on the route. Normally we multiply the line yield of all remaining steps for the Capacity Model but entering a value in this OVR table manually overrides that calculated number. (* from FPSINPUT.RTG_ROUTE_STEP_EQPTYPE_OVR)

MPU

NUMBER(8,4)

N

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* from FPSBASE.WIP_LOT_HIST)

OPERATION

VARCHAR2(50)

N

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

RCP_LABOR_ROLE

VARCHAR2(36)

RCP_LABOR_SEC_PER_BATCH

NUMBER(8,3)

RCP_LABOR_SEC_PER_CARR

NUMBER(8,3)

RCP_LABOR_SEC_PER_UNIT

NUMBER(8,3)

RCP_MAX_BATCH_SIZE_CARRIERS

NUMBER(2)

RQD_SETUP

VARCHAR2(100)

Rqd_setup is determined by ovr_rqd_setup in RTG_TOOL_ASSIGNMENTS and use_process_as_rqd_setup and use_est_mach_rcp_as_rqd_setup from EQP_TYPES. The latter two columns allow us to easily specify for an eqp_type that setup times should be calculated by process or est_machine_recipe. For traditional setups that are a group of recipes we use ovr_rqd_setup. (* from FPSBASE.WIP_LOT_HIST)

SEQ_NUM

NUMBER(7,2)

N

Sequence number of step in route (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_SEC_LONG_WAVG_TO_EOL

NUMBER(11)

N

TCT_SEC

NUMBER(7)

N

Theoretical cycle time in seconds (* from FPSBASE.WIP_LOT_HIST)

UNIT_INT_SEC

NUMBER(9,3)

UPH

NUMBER(9,3)

N

UPH is a commonly used abbreviation which stands for units per hour. It is often referred to as WPH which for wafers per hour but UPH is better because the unit is not always wafer. (* from FPSBASE.RTG_PROCESS_RCP_EQPTYPES)