FPSBASE.ETP_MNT_EPISODE_CURR

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

ETP_E10_STATE

EPISODE_FROM_INST

Start of the episode is when the last production lot missed the cascade unless there is no WIP then it is when the entity was logged into the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

ETP_E10_STATE_BEFORE

EQP_E10_STATE_BEFORE

E10_FROM_SBY_STATE

PREV_BEG_PROC_INST

PREV_MISS_CASC_INST

Previous time a cascade was missed. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

PREV_END_PROC_INST

End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations. (* inherited from FPSBASE.WIP_LOT_HIST)

E10_FROM_INST

Time when the entity was logged into the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

FIRST_QUAL_FROM_INST

First time during the maintenance when the tool was logged into qualification. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

NUM_QUAL_STARTS

NUM_QUAL_LOTS

TOTAL_QUAL_SEC

IS_ONLY_QUAL

Indicates that the entire episode consists only of qual states as determined by the is_qual flag in EQP_L5_TRANSITION_STATES. Typically these episodes consist only of a frequent qual that is run by Operations and the Maintenance team is not involved therefore we might not want to include these episodes in MTTS calculations. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

NUM_ALARMS

IS_ONLY_ALARM

Indicates that the entire episode consists only of alarm states as determined by the is_alarm flag in EQP_L5_TRANSITION_STATES. Typically these episodes consist of the tool being logged UDT by an alarm event like SPC failure and then being logged back up soon after so we might not want to include these episodes in MTTF/MTTR calculations. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

FIRST_NOWIP_FROM_INST

IS_ONLY_SDT_SETUP

NEXT_BEG_PROC_INST

Notes the end of a Green to Green (GTG) series as determined in ETP_STATUS. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

NEXT_JOB_ID

The Job ID that completed with out error to end a Green to Green (GTG) series (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

NONMFG_ETP_STATE_LIST

TOOL_FAILURE_FROM_INST

Time when the entire tool was logged into the UDT state. This is null if this episode does not correspond to a tool-level failure. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_SERVICE_FROM_INST

Time when the entire tool was logged into the SDT state. This is null if this episode does not correspond to a tool-level service. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_DOWNTIME_FROM_INST

Time when the entire tool was logged into either the SDT or UDT state (continuous downtime). This is null if this episode does not correspond to a tool-level downtime. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOTAL_E_RELATED_SEC

The total time during this episode that it was in a state flagged as being equipment related. This could be due to either UDT or SDT states. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

IS_EQP_RELATED_EVENT

Is set to Y when the event is solely caused by the equipment. This is used to determine the Equipment related metrics. Should possible be called has_eqp_related_event. Check L5_state_diagram for states. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

IS_PM_EVENT

Is set to Y if the event included a Preventative Maintenance, PM, event. This is used in the Mean time to (perform) PM, MTTPM metric. Should possible be called has_PM_event. Check L5_state_diagram for states. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

IS_ALARM_EVENT

Is set to Y when the episode included an Alarm state. Should possible be called has_alarm_event. Check L5_state_diagram for states. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

PREV_PROCESS

Process of the previous job on the tool before the job including this lot. Used in combination with prev_recipe to determine if this job cascaded and if it required a setup change. (* inherited from FPSBASE.WIP_LOT_HIST)

DOWN_REASON

A value from a reasonably short list of user-defined reasons why the entity went down. (* inherited from FPSINPUT.EQP_EVENT_HIST)

REPAIR_REASON

These are the values that can be found in EQP_EVENT_HIST REPAIR_REASON. A value from a reasonably short list of user-defined explanations of how the entity will be repaired or what caused it to go down. (* inherited from FPSINPUT.EQP_REPAIR_REASONS)

NUM_E10_TO_MFG

INSERTED_TIME

Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* inherited from FPSINPUT.WIP_EVENT_HIST)

PREV_MISS_CASC_SBY_STATE

PREV_END_PROC_SBY_STATE

EPISODE_TO_INST

End of the episode is when the first production lot started unless there is no WIP then it is when the entity was logged out of the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

E10_TO_INST

Time when the entity was logged out of the E10 state of the episode. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_FAILURE_TO_INST

Time when the entire tool was logged out of the UDT state. This is null if this episode does not correspond to a tool-level failure. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_SERVICE_TO_INST

Time when the entire tool was logged out of the SDT state. This is null if this episode does not correspond to a tool-level service. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

TOOL_DOWNTIME_TO_INST

Time when the entire tool was logged out of continuous downtime into a state other than SDT or UDT. This is null if this episode does not correspond to a tool-level downtime. (* inherited from FPSBASE.ETP_MNT_EPISODE_HIST)

LAST_QUAL_TO_INST

LAST_NOWIP_TO_INST

ETP_E10_STATE_AFTER

EQP_E10_STATE_AFTER

E10_TO_SBY_STATE