FPSADMIN.DASH_REF_P_PROCESSES

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_DISPLAY

The name of the process displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the process. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_ADDL_INFO

Additional information on the process which we show on the Dashboard process summary. For example, the most common machine recipe. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_SUBFAMILY

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_CLASS

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

OPERATION

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* inherited from FPSINPUT.RTG_OPERATIONS)

OPERATION_DISPLAY

All xxx_display columns are used in place of the column xxx for display purposes. The values of these columns can be changed at any time without having to worry about other tables referencing it. (* inherited from FPSINPUT.RTG_OPERATIONS)

OPERATION_FAMILY

Grouping of route-step that is completely dependent on routing information from MES. The primary use of this field is for filtering on Operations Dashboard. Unfortunately for our database structure and naming convention, this field no longer has any link to operation. This is because operation is used primarily for Oper Moves and it is normal for steps in an operation to belong to multiple MES routing groups. For example, a sink step and a furnace step and a measurement step are in the same operation but each step belongs to the appropriate sink/furnace/measurement MES routing groups which we store in operation family. Since Dashboard already uses both operation and operation_family extensively and independently, we decided not to rename either column but simply remove the link. Please note that operation family is similar to process family and in fact they are often the same. The key differences are that operation family has nothing to do with equipment and that comes straight from ETL with no complex logic. Process family is the link between routing and equipment for the Operations Dashboard and therefore has complex logic. (* inherited from FPSINPUT.RTG_OPERATION_FAMILIES)

WAFER_SIZE

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* inherited from FPSINPUT.GEN_WAFER_SIZES)

PROCESS_SORT_WITHIN_OPER

IS_ACTIVE

Flag to enable or disable the tag condition. (* inherited from FPSBASE.MSO_TAG_CONDITIONS)

SORT_ORDER

This is used to sort within the grouping. SORT_ORDER always has a deferrable unique key to ensure uniqueness while allowing the user to make changes without erroring until the commit is attempted. Because of this you must be careful to not violate the unique key otherwise you will lose all of your edits. (* inherited from FPSINPUT.GEN_FACILITIES)

PRIMARY_TOOLS

ALTERNATE_TOOLS

BLOCKED_TOOLS