FPSAPP.EQP_TOOL_PROCESSFAMS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

PROCESS_FAMILY

VARCHAR2(50)

N

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_SUBFAMILY

VARCHAR2(100)

N

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* from FPSBASE.RTG_ROUTE_STEPS_PLUS)

EQP_TYPE

VARCHAR2(50)

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

EST_PCT_OF_SUBFAM_ON_TOOL

NUMBER(4,1)

EST_PCT_OF_TOOL_FOR_PFAM

NUMBER(4,1)

EST_PCT_OF_TOOL_FOR_SUBFAM

NUMBER(4,1)

IS_TOOL_IN_SUBFAM

CHAR(1)

N

MIN_PERM_RANK_SORT

NUMBER(3)

PRI_PFAM_RANK_SORT

NUMBER(3)

PRI_PROCESS_FAMILY

VARCHAR2(50)

PROC_STATE_IF_WAIT

VARCHAR2(5)

PROD_QTY

NUMBER(10)