FPSINPUT.ECTA_REF_P_BASE

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

PRD

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PRDS)

PLANPRD

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* inherited from FPSINPUT.RTG_PLANPRDS)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

BANK

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* inherited from FPSINPUT.RTG_BANKS)

PRTY_CTM_GROUP

This is one of the primary keys of our CTM tables. We use this group rather than the priority because we often have several different priorities which are close and are expected to have the same cycle time. (* inherited from FPSINPUT.WIP_PRIORITIES)

LOT_GROUP

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* inherited from FPSINPUT.WIP_LOT_GROUPS)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

QTY_COMP_FULL

QTY_MOVED_FULL

NUM_LOTS_MOVED_FULL

PROC_STATE_AVG_WIP_FULL

WHY_PROC_FULL

WHY_OTHERS_FULL

WHY_SKIP_BANK_FULL

ABORT_SEC_FULL_WAVG

BLOCK_SEC_FULL_WAVG

DISP_SEC_FULL_WAVG

DOWN_SEC_FULL_WAVG

ENDED_SEC_FULL_WAVG

HOLD_SEC_FULL_WAVG

LONGH_SEC_FULL_WAVG

PROC_SEC_FULL_WAVG

RESRV_SEC_FULL_WAVG

SHUTD_SEC_FULL_WAVG

STG_SEC_FULL_WAVG

WAIT1_SEC_FULL_WAVG

WAIT2_SEC_FULL_WAVG

WAIT3_SEC_FULL_WAVG

QTY_COMP_LONG

QTY_MOVED_LONG

NUM_LOTS_MOVED_LONG

PROC_STATE_AVG_WIP_LONG

WHY_PROC_LONG

WHY_OTHERS_LONG

WHY_SKIP_BANK_LONG

ABORT_SEC_LONG_WAVG

BLOCK_SEC_LONG_WAVG

DISP_SEC_LONG_WAVG

DOWN_SEC_LONG_WAVG

ENDED_SEC_LONG_WAVG

HOLD_SEC_LONG_WAVG

LONGH_SEC_LONG_WAVG

PROC_SEC_LONG_WAVG

RESRV_SEC_LONG_WAVG

SHUTD_SEC_LONG_WAVG

STG_SEC_LONG_WAVG

WAIT1_SEC_LONG_WAVG

WAIT2_SEC_LONG_WAVG

WAIT3_SEC_LONG_WAVG

QTY_COMP_7D

QTY_MOVED_7D

NUM_LOTS_MOVED_7D

PROC_STATE_AVG_WIP_7D

WHY_PROC_7D

WHY_OTHERS_7D

WHY_SKIP_BANK_7D

ABORT_SEC_7D_WAVG

BLOCK_SEC_7D_WAVG

DISP_SEC_7D_WAVG

DOWN_SEC_7D_WAVG

ENDED_SEC_7D_WAVG

HOLD_SEC_7D_WAVG

LONGH_SEC_7D_WAVG

PROC_SEC_7D_WAVG

RESRV_SEC_7D_WAVG

SHUTD_SEC_7D_WAVG

STG_SEC_7D_WAVG

WAIT1_SEC_7D_WAVG

WAIT2_SEC_7D_WAVG

WAIT3_SEC_7D_WAVG

QTY_COMP_2D

QTY_MOVED_2D

NUM_LOTS_MOVED_2D

PROC_STATE_AVG_WIP_2D

WHY_PROC_2D

WHY_OTHERS_2D

WHY_SKIP_BANK_2D

ABORT_SEC_2D_WAVG

BLOCK_SEC_2D_WAVG

DISP_SEC_2D_WAVG

DOWN_SEC_2D_WAVG

ENDED_SEC_2D_WAVG

HOLD_SEC_2D_WAVG

LONGH_SEC_2D_WAVG

PROC_SEC_2D_WAVG

RESRV_SEC_2D_WAVG

SHUTD_SEC_2D_WAVG

STG_SEC_2D_WAVG

WAIT1_SEC_2D_WAVG

WAIT2_SEC_2D_WAVG

WAIT3_SEC_2D_WAVG

TARGET_CT

COMMIT_CT

EST_TRANSIT_SEC

TRANSIT_EXPLANATION

SHIFT_CNT_FULL

SHIFT_CNT_LONG

SHIFT_CNT_7D

SHIFT_CNT_2D

SEQ_NUM

Sequence number of step in route (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

MODULE_DISPLAY

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* inherited from FPSINPUT.GEN_MODULES)

ROUTE_SEGMENT

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

LINE_SECTION

Large grouping of the line, e.g. FEOL, BEOL, Cu, etc. There should be only a handful of values for the entire facility - or if the facility only has one section then we can leave this column blank. (* inherited from FPSINPUT.RTG_LINE_SECTIONS)

IS_MAIN_ROUTE

Y indicates the route is the main processing route for PRD. N indicates it is a rework or alternate route. (* inherited from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

ROUTE_FAMILY

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* inherited from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* inherited from FPSINPUT.RTG_ROUTE_GROUPS)

WAFER_SIZE

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* inherited from FPSINPUT.GEN_WAFER_SIZES)

FACILITY_DISPLAY

The name of the facility displayed on all dashboards and reports. Facility is a short field since it is used in every join so we allow a longer more descriptive name here although often this will be the same as the facility. (* inherited from FPSINPUT.GEN_FACILITIES)

QTY_UNIT

Defines the unit used to measure number of quantity. The key here is that this quantity must be known throughout the entire route through the facility. For example in a sort facility where lots enter in wafers and are broken into die but the number of wafers is still known when the lot completes the facility then the qty_unit must be wafer. It cannot be die because die is not known when the lot enters so die will be the sec_qty_unit. Similarly at a final test facility where the lots enter with both wafers and die known but only die are known when the lot completes the facility then the qty_unit must be die. It cannot be wafer because wafer is not known when the lot completes so wafer will be the sec_qty_unit. Please note the entire process from only wafers to only die must be split into at least two facilities because of this requirement. (* inherited from FPSINPUT.GEN_FACILITIES)

START_WEEK

Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* inherited from FPSINPUT.CAL_WORK_WEEKS)