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FPSAPP.MSO_RESULT_HIST

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Table FPSAPP.MSO_RESULT_HIST"

Table contains information about the measurement step for a given lot and its corresponding MSO process. This table will be used to get the scan grade and also in some cases validate if a scan actually did occur regardless of a event being logged in WIP_EVENT_HIST.

  • Schema: FPSAPP

  • Tablespace: FPSDATAHIST

  • Primary key: FACILITY, LOT, MSO_PROCESS, INST


Column

Type

Nullable

Comment

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

MSO_PROCESS

VARCHAR2(100)

N

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts (* from FPSINPUT.RTG_ROUTE_STEPS)

INST

DATE

N

Time when the event occurred. (* from FPSINPUT.WIP_EVENT_HIST)

INSERTED_INST

DATE

IS_VALID_LOT

CHAR(1)

N

Flag to indicate of the lot logged is a valid lot. If the lot is not valid then the tool_to_clear value is used to reset the counter.

SCAN_GRADE

VARCHAR2(5)

Scan grade. This will determine if we need to increase the sample rate if the scan quality begins to deteriorate.

SCAN_RESULT

VARCHAR2(5)

Scan result. This will either be Pass or Fail

SLOTS_SCANNED

VARCHAR2(100)

Slot map of what slots in the lot carrier were scanned.