FPSAPP.MSOUI_P_PROCESS_ASSIGNMENTS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

MSO_PROCESS

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

TOOL_MSO_MODULE

TOOL_MSO_MODULE is the module responsible for the tool_mso_groups used for the Metrology Sampling Optimizer. The module is used for building the tool hierarchy for the Sampling Dashboard. (* inherited from FPSINPUT.EQP_TOOL_MSO_GROUPS)

PROCFAM_OF_TOOL

TOOL_MSO_GROUP

TOOL_MSO_GROUP is the grouping of tools used for Metrology Sampling Optimizer. This grouping is used in the Sampling Dashboard and for assigning event based sampling rules for a tool group. This group is similar to process family but allows a tool grouping specific to the MSO. (* inherited from FPSINPUT.EQP_TOOL_MSO_GROUPS)