FPSAPP.DASH_B_PROCESS_SUBFAMILY_TOOLS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

QTY_UNIT_PLURAL

Plural form of the quantity unit. For example if qty_unit is defined as wafer then the plural form would be wafers. (* inherited from FPSINPUT.GEN_FACILITIES)

AVG_QTY_PER_CARR_FOR_UPH

Throughput calculations like EET, MPU, and UPH all include wafer_interval_sec which must be multiplied by wafer qty. When calculating for a specific lot, we can use its qty but when calculating generically we use this value which should be set close to the average lot size for the facility. This value can be overridden for an eqp type with exp_qty_per_job. (* inherited from FPSINPUT.GEN_FACILITIES)

HRS_REM_IN_SHIFT

HRS_ELAPSED_IN_SHIFT

HRS_REM_IN_PLAN_DAY

HRS_ELAPSED_IN_PLAN_DAY

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

PROCESS_SUBFAMILY

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

MODULE

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* inherited from FPSINPUT.GEN_MODULES)

GOAL_COMPLETES

Completes goal for the current shift. Typically we calculate either completes or moves goal depending on the site logic and then either multiply moves by est_smp_pct to get completes or divide completes by est_smp_pct to get moves. (* inherited from FPSINPUT.WIP_GOALS_PER_SHIFT)

GOAL_COMPLETES_DAY

QTY_COMP

QTY_COMP_DAY

WIP

WIP_OR_COMING

WIP_OR_COMING_DAY

GOAL_WILL_NOT_ARRIVE

GOAL_WILL_NOT_ARRIVE_DAY

GOAL_REM

GOAL_REM_DAY

EST_PCT_OF_TOOL_FOR_SUBFAM

EST_PCT_OF_SUBFAM_ON_TOOL

NUM_TOOLS_UP

NUM_TOOLS_DOWN

EST_SECONDS_UNTIL_UP

NUM_TOOLS_UP_ADDL_SHIFT

NUM_TOOLS_UP_ADDL_DAY

UTIL_OF_AVAIL

AVG_UPH

AVG_UPH_DAY

EXPECTED_QTY_COMP_REM

EXPECTED_QTY_COMP_REM_DAY