FPSINPUT.RTG_TOOL_ASGN_LOT_PRCS_PATH

LOT

VARCHAR2(32)

N

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC)

PROCESS

VARCHAR2(50)

N

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

N

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

CH_PATH

VARCHAR2(24)

N

A path of chambers which can be used to process the lot on this tool. This is a concatenation of the single character CH from EQP_CHAMBERS similar to CH_ALLOWED. It is desired to list the chambers in order if there is an order however currently the order is not necessary and not used by Scheduler. (* from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH)

OVR_CH_PATH_RANK

VARCHAR2(1)

This assignment rank is on the chamber path level and will override the tool assignment rank if populated. If null, the scheduler will use the tool assignment rank (* from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH)

OVR_EST_MACHINE_RECIPE

VARCHAR2(100)

N

When we use this path table then this value overrides the est_machine_recipe specified in the RTG_TOOL_ASSIGNMENTS_LOT or RTG_TOOL_ASGN_LOT_PROCESS table. It is common for the tool to use a different machine recipe for each different run path because the chambers are often listed in the recipe. But it is perfectly fine for the tool to use the same machine recipe for all run paths since we calculate THP separately for each ch_type_cnt. We require this column to be populated even when it is the same as in the RTA_LOT table to avoid having to join the tables even time we use the PATH table. (* from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH)

OVR_RQD_SETUP

VARCHAR2(100)

For eqp types where the setup is not the recipe or process, populate the setup with this value. Possible use cases are where multiple recipes or processes share the same setup or where we want to represent the setup with a shorter name than the long name of the recipe. This column has the ovr prefix because we have the ability to configure the eqp_type to use either the process or the recipe as the setup in EQP_TYPES. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

OVR_SCHED_WEIGHTS

NUMBER(4,1)

This is how much weight to give the chamber path rank. When populated, this will override the weights for chamber path rank and tool assignment rank. If null, then Scheduler will take the value from the configuration table SCH_C_GROUP_PERM_RANKS. example 1: ovr_sched_weights is 40 -> the chamber path rank will have a weight of 40, regardless of what ovr_ch_path_rank is. example 2: ovr_sched_weights is null and ovr_ch_path_rank == "A" -> the chamber path rank will get the weight for "A" from SCH_C_GROUP_PERM_RANKS example 3: ovr_sched_weights is null and ovr_ch_path_rank is null-> the chamber path rank will use the tool assignment rank and get the weight from SCH_C_GROUP_PERM_RANKS (* from FPSINPUT.RTG_TOOL_ASGN_LOT_RS_PATH)