FPSBASE.WIP_END_SHIFT_HIST

START_SHIFT

DATE

Shifts can be of any length and it is important that all queries get the shift length based on start_shift and end_shift rather than assuming a set number of hours. (* from FPSINPUT.CAL_SHIFTS)

END_SHIFT

DATE

End of shift must be equal to the start of the next shift. Please note that the exact time which is both of the end of the previous shift and the start of the next shift is included in the next shift. In other words, start_shift <= inst < end_shift. (* from FPSINPUT.CAL_SHIFTS)

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PRD

VARCHAR2(64)

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PLANPRD

VARCHAR2(64)

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PLANPRDS)

ROUTE

VARCHAR2(256)

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

BANK

VARCHAR2(36)

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

LOT_TYPE

VARCHAR2(24)

Lot_type is the base of the hierarchy that determines lot_family then lot_group. Ideally lot_type will come straight from the MES with little modification. (* from FPSINPUT.WIP_LOT_TYPES)

PLAN_PRIORITY

VARCHAR2(7)

Permanent priority of the lot set in the MES generally by planning. (* from FPSINPUT.WIP_EVENT_HIST)

IS_NONSTD

CHAR(1)

Our column to indicate non-standard processing at the step. For example, an experiment or a chain that is only active at a particular step or set of steps and then goes back to being normal for the route. If an experiment is severe enough that it affects the final product and has to be planned separately then it will be its own prd or planprd. (* from FPSBASE.WIP_LOT_HIST)

CUSTOMER

VARCHAR2(64)

Customer who will accept shipment of the lot. Currently this only used for grouping and filtering but in the future we might want to allow a customer to view a Dashboard only including their products. (* from FPSINPUT.GEN_CUSTOMERS)

EST_GOAL_COMPLETES

NUMBER(12,4)

EST_GOAL_MOVES

NUMBER(12,4)

EST_SMP_PCT

NUMBER(5,2)

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

FACILITY_SEGMENT

VARCHAR2(36)

Facility segment is the parent of common step and is used as the highest level grouping when we show WIP for a route group or the entire facility where we cannot use route segment. We would prefer somewhere between 8 and 20 facility segments. Typically we will have to define these (as opposed to route_segment which we will typically come from the MES). There is no RTG_FACILITY_SEGMENTS table because sorting of facility segments is determined by common_step_sort. A trigger on RTG_COMMON_STEPS ensures that facility segments are contiguous when the entire facility is sorted by common step. (* from FPSINPUT.RTG_COMMON_STEPS)

GOAL_OPER_MOVES

NUMBER(12,4)

Oper moves goal for the current shift. This should be recorded at only one step of the operation at it can be at any step not necessarily the last one. Since we do not get an oper move if we skip the entire operation, this is typically the maximum goal completes for any step in the operation. Some sites might calculate goal oper moves independently and potentially even get goal moves and completes from the goal oper moves. (* from FPSINPUT.WIP_GOALS_PER_SHIFT)

GOAL_WIP

NUMBER(12,4)

WIP goal for each shift. If you are using the GP logic in FPSAPP to get WIP goals for line balancing then you might want to pull those goals into this table to show on Dashboard. If not, this can be calculated by dividing the goal moves per day (from this logic) by the commit cycle time in days for the step (from CTM_SUMMARY_PLUS). (* from FPSINPUT.WIP_GOALS_PER_SHIFT)

GP_SUBFAMILY

VARCHAR2(58)

GP_subfamily is used for Goal Planner and is an extension of process_family which can additionally include lot_group and an additional suffix. We populate GP_subfamily automatically based on process_family, process_subfamily, gp_subfamily_suffix, and add_lotgrp_to_gp_subfamily using the function GET_GP_SUBFAMILY. We build this starting with nvl(process_subfamily, process_family) followed by gp_subfamily_suffix if populated then followed by lot_group if add_lotgrp_to_gp_subfamily is set to Y. It is possible to have one or two or three parts. You might have values for process_family/process_subfamily/gp_subfamily_suffix/add_lotgrp of Furn/blank/blank/Y and that would give you gp_subfamilies of Furn/Prod and Furn/Dev. Or Furn/HighTemp/blank/Y would give you HighTemp/Prod and HighTemp/Dev. Or Sink/blank/FeedsOxFurn/N would give you Sink/FeedsOxFurn. And so on.

IS_IGNORE_MOVES

CHAR(1)

This flag is in both RTG_OPERATION_FAMILIES and RTG_PROCESSES. If the value is Y for the operation family then we do not count moves from those operations as oper moves. If the value is Y for either the operation family or the process then we do not count moves from the route-step as completes even if our normal logic suggests that it should be a complete. This logic can cause confusion so here are a few important notes. 1) Dashboard does not read the is_ignore_moves flag therefore we must set move_type to DSKIP rather than COMP and we must set is_oper_move to N in order to ignore the move. 2) This flag is often used for staging steps but it is independent of the is_staging_step flag so if you want to ignore staging steps then you need to set these flags appropriately. 3) The flag in RTG_PROCESSES does not directly affect the oper moves but it does affect it indirectly if the is_comp_rqd_for_oper_move is set to Y. In that case, if the only move during the operation is for a process which is ignored then we do not have a complete during the operation and therefore will not count the move from the operation as an oper move since a complete is required. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

IS_IGNORE_WIP

CHAR(1)

N

This flag is in both RTG_OPERATION_FAMILIES and RTG_PROCESSES. If the value is Y for either the operation family or the process then we do not count WIP at the route-step towards the total for the facility. Typically this is set for staging operations. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

LINE_SECTION

VARCHAR2(32)

Large grouping of the line, e.g. FEOL, BEOL, Cu, etc. There should be only a handful of values for the entire facility - or if the facility only has one section then we can leave this column blank. (* from FPSINPUT.RTG_LINE_SECTIONS)

LOT_GOAL_COMPLETES

NUMBER(12,4)

LOT_GOAL_COMPLETES_NOCAP

NUMBER(12,4)

LOT_GOAL_MOVES

NUMBER(8)

LOT_GOAL_MOVES_NOCAP

NUMBER(8)

MAIN_ROUTE_FAMILY

VARCHAR2(36)

Route family of the main route for the prd of the lot. (* from FPSINPUT.WIP_OVR_OPER_MOVES_HIST)

MAIN_ROUTE_GROUP

VARCHAR2(36)

Route group of main route. Often referred to as technology. (* from FPSBASE.WIP_FLUSH)

NUM_CARR_ENDWIP_HOLD

NUMBER(5)

N

NUM_CARR_ENDWIP_NOTHOLD

NUMBER(5)

N

NUM_JOBS_COMP

NUMBER(5)

N

NUM_JOBS_COMP_AUTO

NUMBER(5)

N

NUM_LOTS_ARRV_AFT_GPC

NUMBER(5)

N

NUM_LOTS_ARRV_BEF_GPC

NUMBER(5)

N

NUM_LOTS_COMP

NUMBER(5)

N

NUM_LOTS_COMP_AUTO

NUMBER(5)

N

NUM_LOTS_COMP_REWORK

NUMBER(5)

N

NUM_LOTS_CREATED

NUMBER(5)

N

NUM_LOTS_DSKIP

NUMBER(5)

N

NUM_LOTS_DTONLY

NUMBER(5)

N

NUM_LOTS_ENDWIP_BLOCK

NUMBER(5)

N

NUM_LOTS_ENDWIP_DISP

NUMBER(5)

N

NUM_LOTS_ENDWIP_ENDED

NUMBER(5)

N

NUM_LOTS_ENDWIP_HOLD

NUMBER(5)

N

NUM_LOTS_ENDWIP_PROC

NUMBER(5)

N

NUM_LOTS_ENDWIP_WAIT

NUMBER(5)

N

NUM_LOTS_FINAL_SHIP

NUMBER(5)

N

NUM_LOTS_ISKIP

NUMBER(5)

N

NUM_LOTS_MVIN

NUMBER(5)

NUM_LOTS_OPER_COMPS

NUMBER(5)

NUM_LOTS_OPER_MOVES

NUMBER(5)

N

NUM_LOTS_OPER_MVIN

NUMBER(5)

NUM_LOTS_REPEAT

NUMBER(5)

N

NUM_LOTS_RT_OR_PRD

NUMBER(5)

N

NUM_LOTS_SCRAP_FULL

NUMBER(5)

N

NUM_LOTS_SCRAP_PARTIAL

NUMBER(5)

N

NUM_LOTS_SHIPPED

NUMBER(5)

N

NUM_LOTS_STARTED

NUMBER(9)

NUM_LOTS_STARTWIP

NUMBER(5)

N

NUM_LOTS_TO_REWORK

NUMBER(5)

N

NUM_MERGES_FROM

NUMBER(5)

N

NUM_MERGES_TO

NUMBER(5)

N

NUM_SPLITS_FROM

NUMBER(5)

N

NUM_SPLITS_TO

NUMBER(5)

N

OMIT_FROM_CTM_DUE_TO_SHUTD

CHAR(1)

OPERATION

VARCHAR2(50)

Operation is usually the primary level of routing in the MES and the level where the facility typically reports moves. FPS only allows one tool per step so our step is a lower level of routing than operation although both may be the same if the MES only allows one tool per operation. Note that because operation can include multiple steps and therefore multiple process families that we cannot have any association to equipment by operation. (* from FPSINPUT.RTG_OPERATIONS)

OPERATION_DISPLAY

VARCHAR2(50)

All xxx_display columns are used in place of the column xxx for display purposes. The values of these columns can be changed at any time without having to worry about other tables referencing it. (* from FPSINPUT.RTG_OPERATIONS)

OPERATION_FAMILY

VARCHAR2(36)

Grouping of route-step that is completely dependent on routing information from MES. The primary use of this field is for filtering on Operations Dashboard. Unfortunately for our database structure and naming convention, this field no longer has any link to operation. This is because operation is used primarily for Oper Moves and it is normal for steps in an operation to belong to multiple MES routing groups. For example, a sink step and a furnace step and a measurement step are in the same operation but each step belongs to the appropriate sink/furnace/measurement MES routing groups which we store in operation family. Since Dashboard already uses both operation and operation_family extensively and independently, we decided not to rename either column but simply remove the link. Please note that operation family is similar to process family and in fact they are often the same. The key differences are that operation family has nothing to do with equipment and that comes straight from ETL with no complex logic. Process family is the link between routing and equipment for the Operations Dashboard and therefore has complex logic. (* from FPSINPUT.RTG_OPERATION_FAMILIES)

POSTP_SEC_COMP_WAVG

NUMBER(10,3)

N

POSTP_SEC_ENDWIP_WAVG

NUMBER(8,3)

N

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_DISPLAY

VARCHAR2(50)

The name of the process displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the process. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_GROUP

VARCHAR2(36)

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_MODULE

VARCHAR2(12)

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROCESS_SUBFAMILY

VARCHAR2(100)

Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROC_SEC_COMP_WAVG

NUMBER(10,3)

N

PROC_SEC_ENDWIP_WAVG

NUMBER(8,3)

N

QTY_ARRV_AFT_GPC

NUMBER(9)

N

QTY_ARRV_BEF_GPC

NUMBER(9)

N

QTY_COMP

NUMBER(9)

N

QTY_COMP_AUTO

NUMBER(9)

N

QTY_COMP_REWORK

NUMBER(9)

N

QTY_CREATED

NUMBER(9)

N

QTY_DELTA_FOR_DTONLY

NUMBER(9)

N

QTY_DSKIP

NUMBER(9)

N

QTY_DTONLY

NUMBER(10)

N

QTY_ENDWIP_BLOCK

NUMBER(9)

N

QTY_ENDWIP_DISP

NUMBER(9)

N

QTY_ENDWIP_ENDED

NUMBER(9)

N

QTY_ENDWIP_HOLD

NUMBER(9)

N

QTY_ENDWIP_PROC

NUMBER(9)

N

QTY_ENDWIP_WAIT

NUMBER(9)

N

QTY_FINAL_SHIP

NUMBER(9)

N

QTY_ISKIP

NUMBER(9)

N

QTY_MVIN

NUMBER(9)

QTY_OPER_COMPS

NUMBER(9)

QTY_OPER_MOVES

NUMBER(9)

N

QTY_OPER_MVIN

NUMBER(9)

QTY_REPEAT

NUMBER(9)

N

QTY_RT_OR_PRD

NUMBER(9)

N

QTY_SCRAPPED_FULL

NUMBER(9)

N

QTY_SCRAPPED_PARTIAL

NUMBER(9)

N

QTY_SHIPPED

NUMBER(9)

N

QTY_STARTED

NUMBER(9)

QTY_STARTWIP

NUMBER(9)

N

QTY_TO_REWORK

NUMBER(9)

N

Q_SEC_COMP_WAVG

NUMBER(10,3)

N

Q_SEC_ENDWIP_WAVG

NUMBER(8,3)

N

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

STEP_SEC_DSKIP_WAVG

NUMBER(10,3)

N

STEP_SEC_DTONLY_WAVG

NUMBER(10,3)

N

STEP_SEC_ISKIP_WAVG

NUMBER(10,3)

N

STEP_SEC_RT_OR_PRD_WAVG

NUMBER(10,3)

N

TCT_SEC

NUMBER(7)

Theoretical cycle time in seconds (* from FPSBASE.WIP_LOT_HIST)

TOTAL_HOLD_SEC

NUMBER(38)

N

TOTAL_STEP_SEC

NUMBER(38)

N

Total number of unit-seconds accumulated by lots on hold at this step during the period including lots which moved out during the period and lots which remain at the end of the period. For example, if a 25 wafer lot is on hold at the step for 2 hours then it accumulates 25 wafers * 7200 seconds = 180000 wafer-seconds of hold time.