FPSINPUT.EQP_TOOLS

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool.

ACTIVE_DATE

DATE

The date when a new tool will become active and available for production. There is nothing wrong with keeping this set to a value in the past after the tool is active but this is irrelevant.

ARRIVAL_DATE

DATE

The date when a new tool is expected to arrive into the fab. There is nothing wrong with keeping this set to a value in the past after the tool arrives but this is irrelevant.

BAY

VARCHAR2(12)

N

A bay is a physical area within the building. The bay is important for estimating travel time for a carrier to reach its destination as we usually store these estimates as a matrix of bay-to-bay and assume that the estimated time from any location within one bay to any location within another bay is approximately the same. (* from FPSINPUT.MHS_BAYS)

COORD_X

NUMBER(2)

This is the x coordinate position of the location within its station, in other words horizontal position. The maximum coord_x is the width of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* from FPSINPUT.MHS_RACK_LOCATIONS)

COORD_Y

NUMBER(2)

This is the y coordinate position of the location within its station, in other words vertical position or shelf number. The maximum coord_y is the height of the station. This is optional and is often used for racks and sometimes for carts so we can determine the exact position of the carrier to make it easier to find. (* from FPSINPUT.MHS_RACK_LOCATIONS)

DESCRIPTION

VARCHAR2(256)

Tool desciption. This value is only used to display in the Dashboard.

DETECTION_SEC_AVG_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter.

DETECTION_SEC_AVG_UPPER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter.

DETECTION_SEC_MAX_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the lower limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter.

DETECTION_SEC_MAX_UPPER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have a max time to detect under the upper limit value. The time to detect is the gap between each measurement, only considering measurments that clear a counter.

EQP_TYPE

VARCHAR2(50)

N

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

FIRMWARE_VERSION

VARCHAR2(20)

Firmware/Hardware version the tool us running. This value is only used to display in the Dashboard.

HIDE_IN_DASH

CHAR(1)

Set to Y to hide this tool from the Dashboard and most other reports.

HIDE_IN_MSO

CHAR(1)

Set to Y to hide this tool from the MSO Dashboard and MSO UI. This should be used on tools where no metrology or tracking is required.

IGNORE_BATCH_FOR_INC_BATCH_PCT

CHAR(1)

This flag will allow batch thp tools to not report any incomplete batch pct for ETP if set to Y. This should rarely be used for tools that should schedule as batch tools but not report any ETP loss because of the batch size. This configuration is created specifically for the Mattson Asher tools

IGNORE_MAIN_ALWAYS

CHAR(1)

This flag indicates to ignore the state of the main entity. When this flag is set and the main entity is down and a chamber is up that we schedule lots to that chamber and we consider the tool to be partially up in our ETP calculation. The only known use cases for this are Photo cells that can run track only lots when the track is up and the main cell is down.

IGNORE_MAIN_IF_PRD

CHAR(1)

Set to Y to ignore main tool in cluster calculations when in a PRD state. This is configurable because some tools log better information for main tool and some for chambers.

IS_CRITICAL_IN_NMV

CHAR(1)

Used by NextMove to highlight critical tools in BayView. Ideally the client would update this column via ETL

LABOR_AREA

VARCHAR2(36)

LABOR_AREA allows the ability to create custom groups of tools that are not necessarily in the same bay. This allows you to assign tools to custom work areas that match the way they run the fab.

LABOR_EFFICIENCY_PCT

NUMBER(3)

This is a percentage that will be used to remove the time operators spend doing things other than loading tools from their total available time. This value is tool specific because the location of the tool matters for the delivery time.

LOTS_AT_RISK_AVG_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average lots at risk under the lower limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

LOTS_AT_RISK_AVG_UPPER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average lots at risk under the upper limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

LOTS_AT_RISK_MAX_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have a max lots at risk under the lower limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

LOTS_AT_RISK_MAX_UPPER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have a max lots at risk under the upper limit value. The lots at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

MAX_CARRIERS_TO_RESERVE

NUMBER(2)

Maximum number of carriers the tool is allowed to reserve. This is tool specific and the process might have a different restriction and we take the min.

MODEL_NUMBER

VARCHAR2(50)

Model of tool provided by manufacturer. This value is only used to display in the Dashboard.

OVR_PROCESS_CLASS

VARCHAR2(12)

When the process family is set by process and not by tool but the process class is set by tool then we cannot set the process_class in RTG_PROCESS_GROUPS in a straightforward manner. Therefore we set here and get the process class during the calculation.

OVR_PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families.

OVR_PROCFAM_BY_TOOL_ASGN

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families.

PREFERRED_EQP_MODULE

VARCHAR2(12)

The EQP_MODULE of a tool is automatically calculated based on the module of its primary process family. It is highly discouraged to have tools that are commonly used with multiple process families, but if this case exists you can prefer one module by setting this field. This should normally be blank. Please note this column has nothing to do with the MNT_MODULE for this tool which is assigned in EQP_MNT_FAMILIES, and is always uniquely specified by tool -> eqp_type -> mnt_family -> mnt_module.

PREFERRED_PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families.

PROCESS_GROUP

VARCHAR2(36)

N

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

REMOVAL_DATE

DATE

Date the tool will be removed from the fab used for future capacity modeling. Currently we do not filter tools from current use if this date is in the past as we expect the tool to be deleted from this table. However this is something to consider.

SERIAL_NUMBER

VARCHAR2(100)

Tool serial number. This value is only used to display in the Dashboard.

SHARED_PARENT_TOOL

VARCHAR2(16)

This indicates that multiple tools share the same physical parent tool even though they operate completely independently. It is critical that the shared_parent_tool not have the same name as the tool or any other tool. Tubes in a furnace are one example. Chambers that are completely independent are another example but we need to be very careful when we define chambers or groups of chambers as separate tools. This should be done when there is no possibility that a lot might run across what we define as tools.

SINGLE_CH_TYPE

VARCHAR2(6)

When a tool only has one chamber then we do not include the chamber in EQP_CHAMBERS, however, for purposes of our throughput calculations we need to log the correct ch_type so that jobs can be accurately compared to other tools of the same eqp_type and ch_type. For example, if we have ET101 with one etch chamber A and ET102 with two etch chambers A and B then we estimate that a job processing on ET101 (obviously using only ET101CHA) has the same throughput as a job processing on only ET101CHA.

SOFTWARE_VERSION

VARCHAR2(20)

Software version the tool is running. This value is only used to display in the Dashboard.

TOOL_MSO_GROUP

VARCHAR2(64)

Tool grouping defined for the Metrology Sampling Optimizer. This is generally used for setting up an event base sampling rule where n number of lots will measure at a future step after a specific event for the specified tool group. It can also be used for setting up counters for a specific tool group as well.

UPDATED_INST

DATE

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES)

USE_LOT_COMP_OVR

CHAR(1)

Flag to indicate whether lot process completion requires is_complete to be set to Y in fpsinput.wip_lots_ovr_est_end_inst for a specific tool.

WAFERS_AT_RISK_AVG_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average wafers at risk under the lower limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

WAFERS_AT_RISK_AVG_UPPER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have an average wafers at risk under the upper limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.

WAFERS_AT_RISK_MAX_LOWER_LIMIT

NUMBER(8)

Tool level limit that is used to highlight in the dashboard how many tools have a max wafers at risk under the lower limit value. The wafers at risk is a increments each time a lot runs at the main process tool until a measurement triggers the counter to reset.