FPSAPP.SCH_P_CURR_TOOL_CAST_PORTS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_GROUP

Process group is the critical field where tools and processes come together for the purposes of Scheduler. Process group is in both EQP_TOOLS for the tools and in RTG_PROCESSES for processes. Ideally all tools that run the same set of processes with no crossover including back-up and emergency tools would be in the same process group but it is important to note that this is not technically required for Scheduler as long as all process groups are in the same sched group. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

PORT

Port is the short name of the port on the tool like P1 or LLA. This field is unique within the given tool and is used to save space when we already know the tool, for example in the dashboard tool hover where we show the status of each port. This column is in contrast to the location field which is the full name of the port. Location is unique within the entire facility and almost always includes the tool name like ET99P1 or ET99LLA. In addition, location is usually available from the MES or AMHS as this must be an exact match with the location in MHS_CARRIERS if this gets set when a carrier is placed on the port. On the other hand, the shorter port column is often not available in the MES so we either populate manually or with some complex if-then logic in the ETL based on the naming standards. (* inherited from FPSINPUT.EQP_PORTS)

PORT_MODE

PORT_MODE is the port equivalent to EQP_STATE. Examples might be AUTOMATIC, MANUAL, SEMI-AUTOMATIC, or DOWN. If configured in GEN_FACILITIES, the view DASH_P_TOOL_PORTS can overlay whether the port is occupied along with its carrier and the WIP processing states over the port modes as long as the port mode has is_up set to Y. Therefore it is not necessary to reflect occupied or empty when developing the ETL logic to populate the EQP_PORTS table. (* inherited from FPSINPUT.EQP_PORT_MODES)

PORT_MODE_DISPLAY

The name of the port_mode displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the port_mode. (* inherited from FPSINPUT.EQP_PORT_MODES)

LOCATION

Location of a carrier or lot or durable which comes directly from the tracking system used at the site. This could be a port or internal tool location or tool or rack or stocker or zero footprint storage or room or really anywhere. Many non-automated sites allow users to manually enter locations into their system. Therefore unless we know for sure that the source data implements a size limitation, it is recommended to always trim the value in the ETL to 32 characters to fit into the column size and avoid load errors. For ports, location is the full name of the port which is unique across the entire site and usually includes the tool name. Please see the comment in the port column which explains the difference between location and port. Rack locations are similar. (* inherited from FPSINPUT.MHS_RACK_LOCATIONS)

IS_UP

This field shows if the port mode of the stations is considered up or down. If all ports are down then rank will be R (Ports Down) and ETP will set the state to SBY-RANKR (Standby With All Ports Down). (* inherited from FPSINPUT.EQP_PORT_MODES)

IS_AUTO

This field shows if the port mode is set to automatically deliver material. If the facility either has automated delivery (aka 300mm) or is using semi-automated delivery (aka NextMove) then a port set to a port_mode where this is N but is_up is Y is considered manual. A manual port means that the delivery system cannot use this port. If all ports are manual then rank will be M (Ports Manual) and ETP will set the state to SBY-RANKM (Standby With All Ports in Manual). In addition, we report auto_pct by summarizing the port states in auto and manual. (* inherited from FPSINPUT.EQP_PORT_MODES)

IS_SCHED

This flag indicates that lots in this group should be scheduled. This flag additionally causes TW groups to be included in WIP_STEP_FUTURE which they are normally not. (* inherited from FPSINPUT.WIP_LOT_GROUPS)

AVAILABILITY

WAIT_SEC_TO_SCHED

The lot may be scheduled but must not be allowed to dispatch or start until this number of seconds has elapsed. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

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CAPACITY

In EQP_PORTS, capacity is the number of carriers allowed on the port, which is usually 1. In MHS_CARRIERS, when carrier_class is set to POD then capacity is the number of durables that the pod can hold, which is usually either 1 or 6. This field is only used in MHS_CARRIERS for pods therefore when CARRIER_CLASS is CAST then capacity should be set to the default value of 1. (* inherited from FPSINPUT.EQP_PORTS)

PORT_GROUP

Optional value if tool has different groups of ports, for example 150mm and 200mm. RQD_PORT_GROUP in RTG_TOOL_ASSIGNMENTS indicates what is required for each lot. (* inherited from FPSINPUT.EQP_PORTS)