FPSINPUT.MSOUI_P_ROUTE_STEPS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_MODULE

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS)

MSO_PROCESS

Process definition for this step to be used by the Metrology Sampling Optimizer. MSO process is defined differently to avoid conflict with regular process and common step and because the definition can vary greatly from those concepts (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

IS_MSO_SKIPPABLE

Flag indicating whether this step is allowed to be skipped by the MSO application. This flag controls the options for TO_MSO_PROCESS in the UI and it serves as a last check before sending a skip decision to the MES. Setting the flag to N will keep it from ever being sent as a skip step and will not show it as a Sample step in the UI (* inherited from FPSINPUT.RTG_MSO_PROCESSES)

IS_MSO_ALLOWED_SUB

Flag indicating whether this step can be used as a process sub in the MSO application. This flag is only used by the UI for filtering purposes. A process sub is a metrology process that we cannot make a skip / take decision on, but can be run to clear counters. (* inherited from FPSINPUT.RTG_MSO_PROCESSES)