FPSINPUT.EQP_CHAMBER_TYPES

Data Dictionary

FPSINPUT Tables

> FPSINPUT.EQP_CHAMBER_TYPES

Table FPSINPUT.EQP_CHAMBER_TYPES"

This table has information about each chamber type for a particular equipment type. EQP_TYPE must exist in EQP_TYPES and CH_TYPE must exist in EQP_CHAMBERS with a corresponding tool of the appropriate EQP_TYPE. Populating rows in this table is optional and only needed if overriding the values defined for the EQP_TYPE.

Schema: FPSINPUT
Tablespace: FPSDATA
Primary key: FACILITY, EQP_TYPE, CH_TYPE
Foreign keys: EQP_CH_TYPES_EQP_TYPE_FK: FACILITY, EQP_TYPE REFERENCES FPSINPUT.EQP_TYPES (FACILITY, EQP_TYPE)

Column	Type	Nullable	Comment
FACILITY	VARCHAR2(6)	N	Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)
EQP_TYPE	VARCHAR2(50)	N	Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)
CH_TYPE	VARCHAR2(6)	N	This column is critical for sequential chamber tools where a wafer goes through multiple chambers. It identifies the type of chamber so two chambers with the same ch_type are identical and wafers can use either one. See comment on mfg_pct_per_ch column for an example. For independent chamber tools where all chambers are the same and each wafer goes to only one chamber then ch_type should be set to the default value CH so that ch_type_cnt is 1CH, 2CH, 3CH, etc. (* from FPSINPUT.EQP_CHAMBERS)
DEFAULT_RECIPE_CHG_COST	NUMBER(6)		Default recipe change cost. See comments on USE_SETUP_CHG_AUTO_FOR_SCH for details on when this is used. (* from FPSINPUT.EQP_TYPES)
DEFAULT_RECIPE_CHG_SEC	NUMBER(6)		This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details. (* from FPSINPUT.RTG_PROCESS_GROUPS)
DEFAULT_SETUP_CHG_COST	NUMBER(6)		Default setup change cost. See comments on USE_SETUP_CHG_AUTO_FOR_SCH for details on when this is used. (* from FPSINPUT.EQP_TYPES)
DEFAULT_SETUP_CHG_SEC	NUMBER(6)		This column is part of the Area Scheduler configuration. Please see Area Scheduler documentation for details. (* from FPSINPUT.RTG_PROCESS_GROUPS)