Data Dictionary
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FPSADMIN Tables
> FPSADMIN.MHS_WAFERS
Table FPSADMIN.MHS_WAFERS"
Current wafer slot mapping for a given lot. This helps identify where wafers are currently positioned in the carrier for a given lot.
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Schema: FPSADMIN
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Tablespace: FPSDATA
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Primary key: LOT, WAFER
|
Column |
Type |
Nullable |
Comment |
|---|---|---|---|
|
LOT |
VARCHAR2(32) |
N |
A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* from FPSINPUT.WIP_LOTS_STATIC) |
|
WAFER |
VARCHAR2(32) |
N |
This field contains the wafer id, typically the scribe, identifying the physical wafer that belongs to a lot. |