FPSAPP.SCH_W_TOOL_SCHED_EVENTS

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

TOOL

VARCHAR2(16)

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)

EVENT_TYPE

VARCHAR2(12)

Event Type (* from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

EVENT

VARCHAR2(48)

This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* from FPSINPUT.WIP_EVENTS)

START_INST

DATE

Time when the lot started. (* from FPSINPUT.WIP_STARTS)

ACTUAL_START_INST

DATE

to store the actual start time of the tool event

EARLY_DUE_INST

DATE

to store the early due time of the floating PM tool event, i.e., the early start time of the floating PM could be calculated via substracting the EST_DURATION_SEC value

END_INST

DATE

The time the even is scheduled to end (* from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

ENTITY

VARCHAR2(19)

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

EST_DURATION_SEC

NUMBER(8)

to store the est duration of the tool event

EVENT_CATEGORY

VARCHAR2(40)

to store the event_category, e.g., NOT_TO_SCHEDULE, NOT_TO_START etc.

EVENT_DESC

VARCHAR2(500)

Event Description (* from FPSINPUT.EQP_SCHED_EVENTS_MANUAL)

IS_ACTIVE

CHAR(1)

to indicate if this event is active

LATE_DUE_INST

DATE

to store the late due time of the floating PM tool event, i.e., the late start time of the floating PM could be calculated via substracting the EST_DURATION_SEC value

OTHER_NOTE

VARCHAR2(500)

Some description for this scheduler (* from FPSINPUT.RTG_SCHED_GROUPS)