Data Dictionary
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View FPSAPP.DASH_P_TOOL_SUBFAMS
List of all process subfamilies for each tool. Unlike process family where each tool must be in just one for Dashboard purposes, tools can be in multiple process subfamilies. Ultimately we probably need to include which chambers are disallowed for a tool which is otherwise part of a process subfamily. For example, ET01 is allowed for process subfamily METAL but on only chambers A and B while C cannot do METAL. Once the programming team starts working on this they should instruct the DWH team how they would like this information to be provided. For now I included an empty column named ch_not_part_of_family.
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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PROCESS_FAMILY |
See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES) |
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PROCESS_SUBFAMILY |
Route step family is used for the Dashboard to separate processes in a process family based on shared but limited assignments. It is also the base for GP subfamily. (* inherited from FPSBASE.RTG_ROUTE_STEPS_PLUS) |
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EST_PCT_OF_TOOL_FOR_SUBFAM |
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EST_PCT_OF_SUBFAM_ON_TOOL |
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CH_NOT_PART_OF_FAMILY |