FPSAPP.DASH_P_CHAMBER_HEALTH_CURR

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

CURRENT_HEALTH

The current measurement of health from -3 to 3. (* inherited from FPSINPUT.EQP_MNT_CHAMBER_HEALTH_HIST)

WORST_24_HEALTH

The worst measurement of health over the last 24 hours. (* inherited from FPSINPUT.EQP_MNT_CHAMBER_HEALTH_HIST)

UPDATED_INST

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* inherited from FPSINPUT.GEN_FACILITIES)