FPSADMIN.EQP_MNT_CHAMBER_HEALTH_CURR

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

ENTITY

VARCHAR2(19)

N

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)

CURRENT_HEALTH

NUMBER(4,3)

The current measurement of health from -3 to 3. (* from FPSINPUT.EQP_MNT_CHAMBER_HEALTH_HIST)

UPDATED_INST

DATE

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES)

WORST_24_HEALTH

NUMBER(4

The worst measurement of health over the last 24 hours. (* from FPSINPUT.EQP_MNT_CHAMBER_HEALTH_HIST)