data-dictionary

FPSADMIN.EQP_REF_ALL_SETUPS_BY_TOOL

Data Dictionary

>

FPSADMIN Views

> FPSADMIN.WIP_WAFER_HIST_LOOP

View FPSBASE.EQP_REF_ALL_SETUPS_BY_TOOL

This refreshed table is used in EQP_REF_CH_ALLOWED_STATUS only to increase the speed. Even though this table takes just a second or two refresh, when this query was embedded in the REF view, EQP_CH_ALLOWED_STATUS was taking over 30 seconds at one site. Using this refreshed table it dropped to under a second as expected. This data will change when tools are added/dropped and when setups are added/dropped. The latter will happen more frequently but the former is more critical so by default we add this job after the refresh of EQP_TOOLS_PLUS.

Column

Comment

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

RQD_SETUP_OR_NA