FPSAPP.ETP_MNT_EPISODE_HIST

Data Dictionary

FPSAPP Tables

> FPSAPP.ETP_MNT_EPISODE_HIST

Table FPSAPP.ETP_MNT_EPISODE_HIST"

This table is populated by a trigger when a tool changes ETP State. An episode is a period of time when a tool is not processing during which maintenance may occur. Technically the episode starts when the previous lot processed misses its cascade and the episode ends when the next non-qual lot starts processing (NEXT_BEG_PROC_INST). Also an episode can include only one E10 state (UDT, SDT, ENG, NST) so we split the period into separate episodes if there are multiple E10 states within this period. Example 1 is where the tool goes down to SDT and does a daily qual and then comes up. This is one SDT episode containing one event which is the daily qual. Example 2 is where the tool goes down to SDT and does a daily qual and a weekly PM and then comes up. This is one SDT episode containing two events which are the daily qual and the weekly PM. Example 3 is where the tool goes down to UDT and switches to SDT to do the weekly PM and then it comes up. This is two episodes with the end of the first UDT episode and the start of the second SDT episode at the time the tool is logged to SDT. Note that it might go from UDT directly to SDT or it might go from UDT to SBY and then to SDT but this does not matter.

Schema: FPSAPP
Tablespace: FPSDATAHIST
Primary key: FACILITY, TOOL, ENTITY, EPISODE_FROM_INST

Column	Type	Nullable	Comment
FACILITY	VARCHAR2(6)	N	Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)
TOOL	VARCHAR2(16)	N	Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* from FPSINPUT.EQP_TOOLS)
ENTITY	VARCHAR2(19)	N	The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* from FPSINPUT.EQP_STATUS_VERIFY)
EPISODE_FROM_INST	DATE	N	Start of the episode is when the last production lot missed the cascade unless there is no WIP then it is when the entity was logged into the E10 state of the episode.
DOWN_REASON	VARCHAR2(36)		A value from a reasonably short list of user-defined reasons why the entity went down. (* from FPSINPUT.EQP_EVENT_HIST)
E10_FROM_INST	DATE	N	Time when the entity was logged into the E10 state of the episode.
E10_FROM_SBY_STATE	VARCHAR2(12)	N
E10_TO_INST	DATE	N	Time when the entity was logged out of the E10 state of the episode.
E10_TO_SBY_STATE	VARCHAR2(12)	N
EPISODE_TO_INST	DATE	N	End of the episode is when the first production lot started unless there is no WIP then it is when the entity was logged out of the E10 state of the episode.
EQP_E10_STATE_AFTER	VARCHAR2(3)	N
EQP_E10_STATE_BEFORE	VARCHAR2(3)	N
ETP_E10_STATE	VARCHAR2(3)	N
ETP_E10_STATE_AFTER	VARCHAR2(3)	N
ETP_E10_STATE_BEFORE	VARCHAR2(3)	N
FIRST_NOWIP_FROM_INST	DATE
FIRST_QUAL_FROM_INST	DATE		First time during the maintenance when the tool was logged into qualification.
FIRST_TIME_RIGHT_P	CHAR(1)
FIRST_TIME_RIGHT_U	CHAR(1)
FTRU_END_INST	DATE
FTR_COMMENT_P	VARCHAR2(256)
FTR_COMMENT_U	VARCHAR2(256)
GTG_EPISODE_FROM_INST	DATE		The inst of the first episode with in the Green to green (GTG) epsiodes.
INSERTED_TIME	TIMESTAMP(6)		Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* from FPSINPUT.WIP_EVENT_HIST)
IS_ALARM_EVENT	CHAR(1)		Is set to Y when the episode included an Alarm state. Should possible be called has_alarm_event. Check L5_state_diagram for states.
IS_EQP_RELATED_EVENT	CHAR(1)		Is set to Y when the event is solely caused by the equipment. This is used to determine the Equipment related metrics. Should possible be called has_eqp_related_event. Check L5_state_diagram for states.
IS_ONLY_ALARM	CHAR(1)		Indicates that the entire episode consists only of alarm states as determined by the is_alarm flag in EQP_L5_TRANSITION_STATES. Typically these episodes consist of the tool being logged UDT by an alarm event like SPC failure and then being logged back up soon after so we might not want to include these episodes in MTTF/MTTR calculations.
IS_ONLY_QUAL	CHAR(1)		Indicates that the entire episode consists only of qual states as determined by the is_qual flag in EQP_L5_TRANSITION_STATES. Typically these episodes consist only of a frequent qual that is run by Operations and the Maintenance team is not involved therefore we might not want to include these episodes in MTTS calculations.
IS_ONLY_SDT_SETUP	CHAR(1)
IS_PM_EVENT	CHAR(1)		Is set to Y if the event included a Preventative Maintenance, PM, event. This is used in the Mean time to (perform) PM, MTTPM metric. Should possible be called has_PM_event. Check L5_state_diagram for states.
LAST_NOWIP_TO_INST	DATE
LAST_QUAL_TO_INST	DATE
NEXT_BEG_PROC_INST	DATE		Notes the end of a Green to Green (GTG) series as determined in ETP_STATUS.
NEXT_JOB_ID	VARCHAR2(64)		The Job ID that completed with out error to end a Green to Green (GTG) series
NONMFG_ETP_STATE_LIST	VARCHAR2(512)
NUM_ALARMS	NUMBER(2)	N
NUM_E10_TO_MFG	NUMBER(2)	N
NUM_QUAL_LOTS	NUMBER(2)	N
NUM_QUAL_STARTS	NUMBER(2)	N
PREV_BEG_PROC_INST	DATE
PREV_END_PROC_INST	DATE		End_proc_inst of the previous job on the tool before the job including this lot. Subtracting this from the end_proc_inst of this job gives us the end-to-end time (EET) which is critical for throughput calculations. (* from FPSBASE.WIP_LOT_HIST)
PREV_END_PROC_SBY_STATE	VARCHAR2(12)
PREV_MISS_CASC_INST	DATE		Previous time a cascade was missed.
PREV_MISS_CASC_SBY_STATE	VARCHAR2(12)
PREV_PROCESS	VARCHAR2(50)		The last process that started on the entity.
REPAIR_REASON	VARCHAR2(36)		These are the values that can be found in EQP_EVENT_HIST REPAIR_REASON. A value from a reasonably short list of user-defined explanations of how the entity will be repaired or what caused it to go down. (* from FPSINPUT.EQP_REPAIR_REASONS)
TOOL_DOWNTIME_FROM_INST	DATE		Time when the entire tool was logged into either the SDT or UDT state (continuous downtime). This is null if this episode does not correspond to a tool-level downtime.
TOOL_DOWNTIME_TO_INST	DATE		Time when the entire tool was logged out of continuous downtime into a state other than SDT or UDT. This is null if this episode does not correspond to a tool-level downtime.
TOOL_FAILURE_FROM_INST	DATE		Time when the entire tool was logged into the UDT state. This is null if this episode does not correspond to a tool-level failure.
TOOL_FAILURE_TO_INST	DATE		Time when the entire tool was logged out of the UDT state. This is null if this episode does not correspond to a tool-level failure.
TOOL_SERVICE_FROM_INST	DATE		Time when the entire tool was logged into the SDT state. This is null if this episode does not correspond to a tool-level service.
TOOL_SERVICE_TO_INST	DATE		Time when the entire tool was logged out of the SDT state. This is null if this episode does not correspond to a tool-level service.
TOTAL_E_RELATED_SEC	NUMBER(9)		The total time during this episode that it was in a state flagged as being equipment related. This could be due to either UDT or SDT states.