Data Dictionary
>
FPSAPP Views
> FPSAPP.WIP_WAFER_HIST_LOOP
View FPSBASE.EQP_REF_CAP_ENTITIES
This view calculates cap_entity based on the info in EQP_ENTITIES. It is fast enough as a view for CM since we use this in the GET_THP_VALUES function we need to refresh it into a table. Even though it uses ETP_STATUS, this table rarely changes because it only uses ETP_STATUS to determine which chambers are NST. Therefore we can create the GET_CH_TYPE_OF_CAP_ENTITY function with result_cache using only this table and it will get that information in memory for GET_THP_VALUES.
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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CAP_ENTITY |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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IS_REAL_TOOL |
Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* inherited from FPSINPUT.EQP_TYPES) |
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EQP_TYPE |
Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES) |
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EQP_MODULE |
EQP_MODULE is the module responsible for operating the tool. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* inherited from FPSBASE.EQP_TOOLS_PLUS) |
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CH_LIST |
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CH_TYPE_OF_CAP_ENTITY |
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IS_CAP_ENT_BY_CH |
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CAP_ENTITY_CONFIG_CHECK |