FPSINPUT.RTG_PROCESS_FAMILIES_PLUS

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

PROCESS_FAMILY

VARCHAR2(50)

N

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

AVG_SECONDS_UNTIL_UP

NUMBER(7)

AVG_UPH

NUMBER(9,3)

AVG_UPH_DAY

NUMBER(9,3)

BOTTLENECK_SCORE

NUMBER(5,2)

BOTTLENECK_SCORE_HOVER_MSG

VARCHAR2(1500)

DAY_BNS

NUMBER(5,2)

DAY_BNS_HOVER_MSG

VARCHAR2(1500)

DEFAULT_QTY_MEAS

NUMBER(7)

Default number of wafers measured in a lot on the tool in the family. This is used if the number of wafers measured is not specified for a particular lot. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

DEFAULT_STEP_SEC

NUMBER(7)

This is used as the default for the process family in the fillin logic in CTM_SUMMARY. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

HOURS_TO_DRAIN_WIP

NUMBER(6,2)

IGNORE_BNS

CHAR(1)

If set to Y the bottleneck score will always be 999 so it will be a the bottom of the list. Note that we normally use pace for families with no tools therefore this should generally be set only for families which we do not care about whatsoever. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

IS_CTM_CALC_BY_PROCESS

CHAR(1)

Flag indicating whether we calculate planned queue cycle time by process instead of by eqp_family (* from FPSINPUT.RTG_PROCESS_FAMILIES)

IS_EXEMPT_FROM_TOP_ON_DASH

CHAR(1)

Normally we sort process familiies by Bottleneck Score or WIP but there are some facilities, usually logistics or sometimes metrology, that we do not want to show on the top even when the Score indicates they should be. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

IS_KEY_ON_FACILITY_DASH

CHAR(1)

Should be set for less than 5 of the most critical process families in the facility to keep them always displayed on the facility page in the Key Process Families section. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

IS_KEY_ON_MODULE_DASH

CHAR(1)

Should be set for less than 5 of the most critical process families in the module to keep them always displayed on the module page in the Key Process Families section. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MAX_PROC_TIME_SEC

NUMBER(7)

We typically have decent logic to ignore certain cases and only take 10-50% but this is another way to eliminate bad data. We do not recommend setting this unless you investigate certain cases of throughput oddities and decide there is no other method. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MAX_STEP_SEC

NUMBER(7)

This is a cap on the cycle time for steps in this process family. The most common use is for a process family which has historically been bad but we do not want the cycle time to show that. We hesitated on capping the historical numbers and prefer to only cap commit and target but we somewhat reluctantly agreed to cap history too. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MIN_PROC_TIME_SEC

NUMBER(5)

Normally we ignore process times less than 60 seconds when calculating throughput to avoid the dreaded case when the operator logs begin and end together. However some tools actually process jobs in less than 60 seconds so we need to override this with a smaller number. If desired we could also override with a larger number. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MIN_QTY_FOR_BNS

NUMBER(6)

Minimum current WIP quantity required for a bottleneck score to be calculated. If the current WIP quantity is below this number then the bottleneck score will be set to 999. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MIN_STEP_SEC

NUMBER(7)

See MAX_STEP_SEC comment. This minimum limit should rarely be used. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

MODULE

VARCHAR2(12)

Modules are departments of people who manage certain areas of the fab. The modules are assigned ownership of a set of tools to operate and maintain as well as steps on the route that they are responsible for executing. Since many of our tables include tool and step information together, we must distinguish between the owner of the step (WIP_MODULE), the owner of the operation of the tool (EQP_MODULE), and the owner of the maintenance of the tool (MNT_MODULE). WIP_MODULE is used to credit moves and set goals. Each route-step is assigned to a process family and then its wip_module is defined by the process family. EQP_MODULE is used to group tools particularly for tool performance reporting. Similar to WIP, each tool is dynamically assigned to a process family based on its assignments and then its eqp_module is defined by the process family. MNT_MODULE is usually the same as EQP_MODULE but unlike EQP_MODULE is not dependent on assignments but only on the EQP hierarchy. Each tool is assigned to an eqp_type and each eqp_type is assigned to a mnt_family and each mnt_family is assigned to a mnt_module. (* from FPSINPUT.GEN_MODULES)

MODULE_DISPLAY

VARCHAR2(20)

N

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* from FPSINPUT.GEN_MODULES)

NUM_TOOLS_DOWN

NUMBER(6,2)

NUM_TOOLS_DOWN_MAQT

NUMBER(6,2)

NUM_TOOLS_NST

NUMBER(6,2)

NUM_TOOLS_UP

NUMBER(6,2)

NUM_TOOLS_UP_MAQT

NUMBER(6,2)

OVR_ADD_TO_GP_CUTOFF_MINS

NUMBER(3)

Override the default Goal Planner add to cutoff minutes from GEN_FACILITIES (* from FPSINPUT.RTG_PROCESS_FAMILIES)

OVR_MIN_GOAL_COMP_FOR_BNS

NUMBER(6)

Override the default minimum goal completes when calculating bottleneck score. An adjusted goal less than this number will show a BNS = 100. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

OVR_UTIL_OF_AVAIL_FOR_MAQT

NUMBER(4,3)

This is the override value used in the multi area queue timer wip ETL (RTG_REF_QUEUE_MULTI_AREA_WIP) for the utilization of availability used in determining the % of the available tools in the timer to process the WIP. If left null, the ETL will use the plan avail * plan util. This was created as the plan avail and plan util columns are used for the Dashboard targets on the tool state history charts and some clients want to use non target values for the queue timer evaluation. (* from FPSINPUT.EQP_TYPES)

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

SORT_ORDER

NUMBER

This is used to sort within the grouping. SORT_ORDER always has a deferrable unique key to ensure uniqueness while allowing the user to make changes without erroring until the commit is attempted. Because of this you must be careful to not violate the unique key otherwise you will lose all of your edits. (* from FPSINPUT.GEN_FACILITIES)

USE_COMING_HOLD_WIP_IN_BNS

CHAR(1)

Column controls if HOLD wip not at the current operation will be included in the BNS. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

USE_CURR_HOLD_WIP_IN_BNS

CHAR(1)

Column controls if HOLD wip at the current operation will be included in the BNS. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

USE_DUR_FAM_AS_SUBFAMILY

CHAR(1)

Using durable family is the third of three ways to set process_subfamily. If set to Y then the durable_family from RTG_DURABLE_ASSIGNMENTS will be the process_subfamily as long as ovr_process_subfamily is not populated. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

USE_SETUP_AS_SUBFAMILY

CHAR(1)

UTIL_OF_AVAIL

NUMBER(5