Data Dictionary
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FPSADMIN Views
> FPSADMIN.WIP_WAFER_HIST_LOOP
View FPSBASE.EQP_REF_CH_ALLOWED_STATUS
This refreshed table is a replacement for the GET_CH_ALLOWED_STATUS function which was too slow. It is used in WIP_STEP_FUT_ASSIGNMENTS where it is critical for speed of the WIP_CURR_LOTS_TOOLS table refresh. IMPORTANT: This table does not check the status of the main tool because we already do that in WIP_STEP_FUT_ASSIGNMENTS so this simplifies and speeds this function. This query returns a delimited list of ch_type values which are included in the ch_allowed run path but do not have at least one chamber up. If this query returns null then the ch_allowed has a valid run path. If it return anything then it cannot run due to no run path on the one or more ch_types list. For a tool that has A+B of ch_type ET and it has C+D of ch_type DEP and A+C are MFG and B+D are NONMFG then ch_allowed ABCD would return null because it requires both chamber types and it can run on a chamber of each type. AC, ABC, ACD would also return null for the same reason. A would also return null because it does not require a DEP ch_type and it has an ET ch_type to use. Similarly C would return null. ABD would return DEP as would AD and D. BCD would return ET as would BC and B. BD would return ET,DEP because it requires both types but has neither available.
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Column |
Comment |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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CH_ALLOWED |
List of chambers allowed using the single character CH from EQP_CHAMBERS. While the concepts of cap_entity (capacity entity) and ch_type are important to our logic we agreed that there is no RMS or EI or MES on the planet that understands these concepts. All of these systems go by tool and chambers allowed and therefore our input tables must do the same. We list all chambers that can run and then calculate subsets of these chambers based on CH_TYPE. If all chambers are the same type then we assume you can run on any one or more of the chambers allowed. If the chambers are different types then we assume that at least one chamber of each type is required to run. If you populate either RTG_TOOL_ASGN_LOT_xxx_PATH table then you can leave ch_allowed blank since it will not be used. However there is nothing wrong with populating ch_allowed as a backup plan. (* inherited from FPSINPUT.RTG_TOOL_ASSIGNMENTS) |
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RQD_SETUP_OR_NA |
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CH_ALLOWED_NONMFG_E10_STATES |
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CH_ALLOWED_NONMFG_MSG |
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CH_ALLOWED_PENDING_MSG |
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CH_ALLOWED_EST_CH_USED |
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EST_SECONDS_UNTIL_UP |